Method for manufacturing p-type and n-type semiconductor light extraction vertical conduction LED (light-emitting diode)
A technology of light-emitting diodes and semiconductors, which is applied to semiconductor devices, electrical components, circuits, etc., can solve the problems of difficulty in punching sapphire substrates, failure of electrodes to obtain optimal light output, and huge impact on yield, so as to increase the amount of light output. and luminous efficiency, improve yield, and ensure the effect of efficiency
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Embodiment 1
[0048] Example 1: p-type semiconductor emits light
[0049] The manufacturing method of the p-type semiconductor light-emitting vertical conduction light-emitting diode:
[0050] (1) if figure 1As shown, a sapphire substrate is provided, and a light-emitting structure of a light-emitting diode is epitaxially grown on the front surface of the substrate. The light-emitting structure includes a GaN buffer layer and a GaN light-emitting diode epitaxial layer formed in sequence. The GaN light-emitting diode epitaxial layer includes an n-type GaN layer, a multi-layer quantum well active layer (multi-quantum well active layer, MQW active layer, that is, a light-emitting layer) and a p-type nitride layer arranged in sequence. Gallium layer;
[0051] (2) if figure 2 As shown, a p-electrode structure is formed on the p-type gallium nitride layer. The p-electrode structure includes a transparent electrode and a p-bonding pad arranged in sequence, and can be connected to an external c...
Embodiment 2
[0071] Example 2: n-type semiconductor light output
[0072] Such as Figure 12 As shown, the difference between this embodiment and Embodiment 1 is that the structure of the p-electrode in this embodiment is exactly the structure of the n-electrode in Embodiment 1, and the structure of the n-electrode in this embodiment is exactly the structure of the n-electrode in Embodiment 1. In the structure of the p-electrode, the pad in this embodiment is not a p-pad, but an n-pad. Figure 13 yes Figure 12The bottom view of , showing the light-emitting surface (reverse surface, n-electrode side) of the n-type semiconductor light-emitting vertical conduction light-emitting diode. Figure 14 yes Figure 12 The top view of , shows the front side (p-electrode side) of the n-type semiconductor light-emitting vertical conduction light-emitting diode, and the dotted line is the pattern of the n-pad and the sapphire hole on the back side.
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