Mach-Zehnder silicon light modulator
A modulator and silicon photonics technology, applied in the field of integrated optics, can solve the problem of weak dispersion effect of free carrier plasma, reduce the time of depletion and injection into the junction region, increase the modulation speed, and reduce the access resistance Effect
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[0038] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.
[0039] A novel Mach-Zehnder silicon optical modulator of the present invention consists of an optical input channel, a multi-mode interference optical splitter, a ridge optical waveguide, a "Tian" type PN junction phase shift arm, a multi-mode interference optical coupler, and an optical output Channel composition. Among them, the "Tian" type PN junction phase shift arm is a ridge optical waveguide composed of double-layer PN junctions separated by intrinsic silicon layers. The two layers of PN junctions are antisymmetrically arranged, that is, the P-doped region of the upper layer corresponds to the N-doped region of the lower layer, and the N-doped region of the upper layer corresponds to the P-doped region of the...
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