High-precision electromigration early warning circuit

Abstract

The invention discloses a high-precision electromigration early warning circuit, which comprises an interconnection wire testing structure, a two-stage low-gain amplifier, a high-gain comparator and an output stage. An output end of the interconnection wire testing structure is connected with an input end of the two-stage low-gain amplifier; an output end of the two-stage low-gain amplifier is connected with an input end of the high-gain comparator; and an output end of the high-gain comparator is connected with the output stage.

Description

technical field [0001] The invention relates to an early warning circuit, in particular to an electromigration early warning circuit. Background technique [0002] In the context of shrinking feature size, increasing integration and chip area, and increasing actual power consumption, the approach of physical limits increases the sensitivity of various failure mechanism effects that affect the reliability of integrated circuits, which need to be considered and weighed in design and process The factor increases greatly, and the reliability margin tends to disappear, so that the reliability problem faces a huge challenge. Among many integrated circuit reliability problems, the electromigration of metal interconnection is one of the main reasons for the failure of integrated circuits. Electromigration can easily cause open and short circuits of metal wires, resulting in changes in the resistance value of interconnection lines. In the case that the size of the device is continuo...

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Problems solved by technology

However, the early warning circuit requires the use of a resistor bridge structure with the same resistance value. However, in the actual process, the resistance value has a considerable fluctuation range, and the size of the resistance itself cannot be precisely controlled, so it is difficult to achieve in practical applications; and , the size of the "threshold threshold" of the comparator in the early warning circuit is obtained by using the asymmetrical size of the differential input tube or the load tube. In the actual process, its size is difficult to control accurately; in addition, the threshold of the comparator in the early warning circuit The threshold is actually an artificially introduced offset voltage, and the unnecessary offset introduced by the process cannot be eliminated by traditional offset cancellation technology

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