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Method for obtaining energy distribution of section of any laser beam based on orthogonal acoustic-optic deflectors

An acousto-optic deflector, laser beam technology, applied in the direction of laser welding equipment, welding equipment, metal processing equipment, etc., to achieve the effect of quality and ability improvement, quality improvement, and high flexibility

Active Publication Date: 2012-05-09
中国航天科技集团公司第五研究院第五一0研究所
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Problems solved by technology

And for special etching profile with laser etching processing

Method used

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  • Method for obtaining energy distribution of section of any laser beam based on orthogonal acoustic-optic deflectors
  • Method for obtaining energy distribution of section of any laser beam based on orthogonal acoustic-optic deflectors

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Embodiment Construction

[0014] The method for obtaining arbitrary laser beam profile and energy according to the present invention will be further described below through specific examples.

[0015] Acquisition of laser spot with triangular shape and uniform energy distribution:

[0016] refer to figure 1 First, the orthogonal acousto-optic scanning deflector 2 is placed orthogonally at the output port of the laser 1 . Set the target laser spot area to 0.2mm 2 of triangular spots. Adjust the excitation waveform of the X, Y direction acousto-optic deflector (the required waveform is generated by an external waveform generator) and the power of the laser beam to 15W, so that the laser beam can be scanned at a small angle and high frequency, and the cross-sectional area can be obtained as 0.2mm 2 , a triangular equivalent laser spot with a power of 15W and a uniform distribution of power. The obtained equivalent laser spot can be used to process the etched section into a V-shaped groove structure.

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Abstract

The invention discloses a method for obtaining equivalent laser spots with any shape and energy section based orthogonal acoustic-optic deflectors. According to the method, due to the use of two acoustic-optic deflectors which are mutually-orthogonally arranged, a laser beam is enabled to be scanned in the orthogonal direction and is focused to obtain finely-focused equivalent laser spots; in addition, the shapes of the equivalent laser spots and the laser scanning density are effectively controlled, so that any distribution of the shapes and the energy sections of the equivalent laser spots is realized; and the method not only can be used for producing a three-dimensional microstructure, but also can be used for high-precision processing of the surfaces of workpieces.

Description

technical field [0001] The invention relates to a method for obtaining an arbitrary laser beam power profile, in particular to a method for obtaining an arbitrary shape and power profile distribution by using an orthogonal acousto-optic deflector. Broad application prospects. Background technique [0002] The effect of laser processing strongly depends on the shape of the processing laser beam and the energy distribution of the beam spot profile, which is especially important for etching processing. It is possible to etch different cross-sectional structures in principle by using the development of a specific beam distribution, which is an important aspect for the future application of laser processing. [0003] For general laser beams, the output of the fundamental mode is a Gaussian beam, and the high-order mode is a beam with multi-peak light intensity distribution. There is a strong industrial demand for beam technologies that transform beams of these fundamental m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/073
Inventor 陈学康吴敢王瑞杨建平曹生珠韦波
Owner 中国航天科技集团公司第五研究院第五一0研究所
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