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Device for controlling and analyzing PI (Physik Instrumente) micropositioner

A technology of micro-motion table and data encapsulation, applied in the program control and electrical program control of sequence/logic controller, can solve the problems affecting real-time performance and acquisition of micro-motion table, and achieve reliable performance, strong real-time performance, compact effect

Inactive Publication Date: 2012-03-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantage is that it is necessary to establish a separate communication circuit to connect the micro-motion platform and the host computer (PC or industrial computer), and the information of the micro-motion platform cannot be obtained by other nodes in the system in real time, and must be forwarded by the host computer to other subsystems , affecting the real-time

Method used

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  • Device for controlling and analyzing PI (Physik Instrumente) micropositioner
  • Device for controlling and analyzing PI (Physik Instrumente) micropositioner
  • Device for controlling and analyzing PI (Physik Instrumente) micropositioner

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Embodiment Construction

[0018] The present invention will be described below in conjunction with the accompanying drawings and specific embodiments, and those skilled in the art can understand the functions and advantages of the present invention according to the content disclosed in this specification.

[0019] figure 1 It is a functional block diagram of a device for controlling and analyzing a PI micro-motion stage in the present invention.

[0020] Depend on figure 1 As shown, in the device for controlling and analyzing the PI micro-motion platform, the host computer uses the network port data as the control input of the PI micro-motion platform, and sends it to the network port data receiving and sending module for processing; in this embodiment, it is used to control the PI micro-motion platform The network port data of the mobile station is packaged data according to the TCP / IP network protocol, which belongs to the prior art and will not be repeated here. According to the control protocol o...

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Abstract

The invention discloses a device for controlling and analyzing a PI (Physik Instrumente) micropositioner, and the device is mainly used for a subsystem of a nano-positioning workpiece table. An upper computer takes port data as the control input of the PI micropositioner, and the port data is sent to a port data receiving and sending module to be processed; a data processing module in the device converts ASCII (American Standard Code for Information Interchange) Command data flow in the port data into GCS (Gate Control and Sequencing Computer) Command data flow which can be identified by the PI micropositioner; the GCS Command data flow is sent to the PI micropositioner by a serial port data receiving and sending module; the serial port data receiving and sending module in the device is in charge of receiving the feedback data of the PI micropositioner; the GCS Command data flow is converted into the ASCII Command data flow by a data analysis module; and after the port data receiving and sending module packages the analyzed data according to a specified format again, the data is sent to the upper computer. The device is integrated in the original control circuit, and the control link of the PI micropositioner is simplified on the premise that the original control function is not affected, therefore the subsystem of a nano-positioning workpiece table has the advantages of more compact structure, more reliable performance and stronger instantaneity.

Description

technical field [0001] The invention relates to the technical field of special equipment for microelectronics, in particular to a device for controlling and analyzing a PI micro-motion stage, which is used in a nano-positioning workpiece stage subsystem in a photolithography machine. Background technique [0002] The workpiece table technology is one of the key technologies to realize the overall performance of the lithography machine. Its motion accuracy, stroke and speed determine the resolution and yield of the final product. At present, there are two main design ideas for the design scheme of large-stroke and ultra-precision workbenches: one is the single-stage feed method, which adopts linear motor non-contact feed or uses static friction to drive the feed; the other is the two-stage feed method, that is, adopts The way of combining coarse motion system and micro motion system. The system involved in the present invention adopts a workpiece table structure combining a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/04
Inventor 陈磊胡松马平严伟
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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