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Reflecting mirror with low loss and high reliability

A mirror and reliability technology, applied in the field of mirrors, can solve problems such as poor environmental stability of mirrors, achieve high anti-laser damage threshold, extremely low scattering, and meet application requirements.

Inactive Publication Date: 2013-10-23
FLIGHT AUTOMATIC CONTROL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the situation of poor environmental stability of the reflector in the prior art, the present invention provides a high-reliability reflector with high anti-laser threshold, strong anti-plasma environment ability, and small scattering loss

Method used

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  • Reflecting mirror with low loss and high reliability
  • Reflecting mirror with low loss and high reliability
  • Reflecting mirror with low loss and high reliability

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Embodiment Construction

[0014] The present invention will be further described below by specific embodiment:

[0015] The present invention adopts dual ion beam sputtering deposition process to alternately plate regular quarter working wavelength TiO on the nano-scale quartz substrate 2 / SiO 2 Thin-film high-reflection film system 5, and an extremely thin layer of air interface layer material HfO is plated on the outermost layer 2 , After the plating is completed, the mirror film is subjected to a post-treatment process of 340°C / 6h in the air.

[0016] see figure 1 , which is a schematic diagram of dual ion beam sputtering deposition coating. The main ion source 2 faces the target 4, the auxiliary ion source 3 faces the nanoscale quartz substrate 1, and the target 4 faces the nanoscale quartz substrate 1 at an inclination angle of 45°. When plating the basic film system Sub / (HL)^n xH on the mirror substrate, the dual ion beam deposition process used is consistent with the existing technology; the...

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Abstract

The invention relates to a reflecting mirror with high reliability for a laser gyro prepared through ion beam sputtering. The reflecting mirror is prepared by the following steps of: alternately plating a regularTiO2 / SiO2 film high reflective coating with 1 / 4 working wavelength on a nano-grade quartz base by adopting a double-ion-beam sputtering and depositing process, plating a layer of extremely thin air interface layer material HfO2 at the outermost layer, and carrying out postprocessing under the condition of 340 DEG C / 6h on a reflecting mirror film in the air after the plating is finished. The reflecting mirror provided by the invention has extremely low loss and dispersion, a high laser damage resistant threshold, heat stability within 340 DEG C and favorable plasma discharging environment resisting capacity and can keep stable optical property of over 15000Sec in an environment with the plasma energy of 200w. The reflecting mirror prepared by using the technology provided by the invention has stable working property in a gyro resonator, has high environment reliability and can meet the application requirement of a high-precision laser gyro.

Description

technical field [0001] The invention relates to a reflector, in particular to a reflector with high reliability, low loss and high reliability. Background technique [0002] The mirror is one of the core components of the laser gyroscope. In the ring laser gyroscope, the laser is confined in the cavity through the control of several mirrors to form a ring laser circuit. The performance stability of the transmitter mirror in the resonator cavity and the scattering of the mirror The parameter is one of the main factors affecting the accuracy of the gyroscope. Therefore, it is required that the mirror film in the laser gyroscope resonator has high laser stability, plasma stability, and thermal stability; and the negative effect of the scattering parameters of the mirror on the drift accuracy of the ring laser gyroscope is weakened. Therefore, it is necessary to develop low-scattering high-reliability mirrors. [0003] The existing technology is to use dual ion polishing techn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/08G02B1/10
Inventor 薛青云刘希强苏宇陈勇单凡李县洛陈帛雄张振辉
Owner FLIGHT AUTOMATIC CONTROL RES INST
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