Purification device and purification method for electronic grade ultra-pure ammonia

Abstract

The invention discloses a purification device for electronic grade ultra-pure ammonia. The purification device comprises a liquid ammonia storage tank, a liquid ammonia pump, a carburetor, a degreaser, rectifying towers, a terminal purifier, a condenser and a product storage tank; the rectifying towers comprise a first rectifying tower and a second rectifying tower; the liquid ammonia pump is connected to the liquid ammonia storage tank and used for pumping liquid ammonia to the carburetor; the output of the carburetor is connected to the degreaser; the output of the degreaser is connected to the upper middle part of the first rectifying tower; the output of the tower top of the first rectifying tower is connected to a tower kettle of the second rectifying tower; the output of the tower top of the second rectifying tower is connected to the terminal purifier; the output of the terminal purifier is connected to the condenser; and the output of the condenser is connected to the product storage tank. In addition, the invention also provides a purification method for purifying the electronic grade ultra-pure ammonia by using the purification device. By using the device and the method, the limitation of the traditional ultra-pure ammonia refining process flow is avoided, the refining process of the ultra-pure ammonia is simplified, the energy consumption of the whole production process is greatly reduced, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a gas purification device and a purification method thereof, in particular to an electronic-grade ultra-pure ammonia purification device and a purification method thereof. Background technique [0002] In the existing ultra-pure ammonia purification industrial devices, the process routes adopted are basically similar, such as the electronic-grade ultra-pure ammonia purification and extraction device disclosed in the utility model patent CN200920235917.4 and the 7N mentioned in the invention patent application CN201010140687.0 The purification device for electronic grade ultra-pure ammonia uses industrial liquid ammonia as the raw material. It is vaporized by a vaporizer, then deoiled by a degreasing device, dried and dehydrated by a molecular sieve adsorber, and then directly enters a rectification tower. Purifier deep water removal to get the final product. In this process, although high-purity products can be obtained in the...

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Problems solved by technology

In this process, although high-purity products can be obtained in the end, the process is complicated. The ammonia has been vaporized and condensed for many times, and the adsorption and other processes need to be regenerated, which consumes too much electric energy. , is very energy-inefficient, resulting in high product production costs; and installing a dry adsorption device before rectification, it is easy to bring new particles and impurities into the rectification tower, causing fluctuations in product quality

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