Sub-angstrom-level super-smooth transparent surface test system based on differential scattering

Abstract

The invention discloses a sub-angstrom-level super-smooth transparent substrate surface test system based on differential scattering. The sub-angstrom-level super-smooth transparent substrate surface test system consists of a light source system, a rotary table system, a sample stage system, a photoelectric detection system and a data collection and display system. In the rotary table system as shown in a figure in the specification, each component is in fully rigid connection; precision rotary tables C1 and C2 are fixed on an optical platform A by standard fastening screws; and a polarization analyzer, a photoelectric detector and the like are fixedly connected onto the precision rotary table C2 by an extension plate of the measurement system. By using the polarization interference principle and regarding the first-order differential scattering perturbation theory as a guideline, suitable polarizing direction and polarization analyzing direction are selected to eliminate the volume scattering of the substrate and effectively and independently measure the microstructure of the sub-angstrom-level super-smooth transparent substrate surface. The sub-angstrom-level super-smooth transparent substrate surface test system based on differential scattering can be used for rapidly and accurately screening fused quartz or microcrystalline glass substrates used in the research and production of high-precision laser gyroscopes, and synchronously, the invention provides a universal method for testing the super-smooth transparent substrate surface.

Description

technical field [0001] The invention is a high-precision testing system applied to sub-Angstrom ultra-smooth and transparent surfaces, belonging to the field of optical testing. Background technique [0002] In the development and production process of laser gyro, the ultra-smooth substrate is extremely important, and it is the basis for making high-quality and high-reflection mirrors. At present, in order to meet the needs of the development and production of high-precision laser gyroscopes, the surface root mean square roughness (RMS) of super-polished fused silica or glass-ceramic substrates has been achieved to be less than 1 ?, or even 0.6 ? (atomic force microscope measurement data), which is almost the test limit of all advanced surface testing instruments at present, and it is a great challenge for the testing and selection of ultra-smooth substrate surfaces. In view of the strict requirements of the laser gyro on the surface roughness of the mirror and the direct r...

AI Technical Summary

Problems solved by technology

Since the surface of the substrate to be detected is very smooth and the surface scattering is very weak, if it is accompanied by volume scattering of the substrate, the measurement data will not truly reflect the microstructure information of the substrate surface, and it may even happen that the surface scattering is completely submerged by the volume scattering Happening

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