Welding method of super-high voltage short arc mercury conductive molybdenum foil and super-high voltage short arc mercury lamp

Abstract

The embodiment of the invention discloses a welding method of a super-high voltage short arc mercury conductive molybdenum foil. In the method, the molybdenum foil is welded and connected with a metal rod including a gasket or a molybdenum cup; the method comprises the following steps of: fixing the gasket or the molybdenum cup on the metal rod and fixing the molybdenum foil on the gasket or the molybdenum cup by using a welding material, wherein the welding material at least comprises one of a tantalum foil or niobium. The embodiment of the invention also discloses a super-high voltage short arc mercury lamp. According to the welding method for connecting the super-high voltage short arc mercury conductive molybdenum foil with an electrode and the super-high voltage short arc mercury lamp, provided by the embodiment of the invention, by using the welding material tantalum foil or niobium, the conductive molybdenum foil is firmly connected with the gasket or the molybdenum cup through spot welding or other means so that the current can be conducted to the electrode in the lamp from outside of the lamp through the conductive molybdenum foil; simple process structure is obtained, the reliability of a welding part is assured and the service life of the product and the safety in use are improved.

Description

technical field [0001] The invention relates to the field of photolithography manufacturing, in particular to a welding method for conductive molybdenum foil of an ultra-high-voltage short-arc mercury lamp and the ultra-high-voltage short-arc mercury lamp. Background technique [0002] For a long time, the explosion problem of ultra-high pressure short-arc mercury lamps has plagued the manufacturing industry. The industry has invested a lot of manpower and material resources. Because the cause of the explosion has not been found, the problem of explosion has not been solved. [0003] see figure 1 , is a schematic structural diagram of an ultra-high pressure short-arc mercury lamp, wherein the metal cap 7 is welded and connected to the metal rod 9 including the gasket 92 through the molybdenum foil 8 . [0004] In the prior art, since the metal cap of the ultra-high pressure short-arc mercury lamp needs to be electrically connected to the interior of the lamp, the ultra-high...

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Problems solved by technology

[0002] For a long time, the explosion problem of ultra-high pressure short-arc mercury lamps has plagued the manufacturing industry. The industry has invested a lot of manpower and material resources. Because the cause of the explosion has not been found, the problem of explosion has not been solved.

After a lot of research, the company found that the explosion of the ultra-high pressure short-arc mercury lamp was caused by the platinum solder that would cause safety hazards in the use of the ultra-high pressure short-arc mercury lamp. Specifically, in the work of the ultra-high pressure short-arc mercury lamp, the company passed Research has found that platinum reacts with the mercury vapor in the ultra-high pressure short-arc mercury lamp, which gradually loosens the connection between the molybdenum foil and the gasket and causes it to fall off. The contact resistance and temperature will increase accordingly and an explosion will occur. This hidden danger It will not only blow up the optical engraving machine but also cause a certain degree of damage to the optical system, and even cause production to stop

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