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Aerostatic thrust bearing

A technology of thrust bearings and air static pressure, applied in bearings, shafts and bearings, mechanical equipment, etc., can solve the problems of small load capacity, poor stability, low rigidity, etc., to reduce thermal deformation, improve radial stiffness, and enhance The effect of bearing stability

Inactive Publication Date: 2011-10-05
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of existing aerostatic thrust bearings such as low rigidity, small carrying capacity, and poor stability, the purpose of the present invention is to provide an aerostatic thrust bearing with high stiffness, large carrying capacity, and strong stability

Method used

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Embodiment Construction

[0018] In order to make the purpose, technical solution and advantages of the present invention clearer, the working principle, structure and specific implementation of the present invention will be further introduced below in conjunction with the accompanying drawings.

[0019] like figure 1 , figure 2 and image 3 A schematic diagram of the structure of the aerostatic thrust bearing provided by the present invention is shown. The bearing includes a supported part 1 , a bearing body 2 and a smooth plane 3 .

[0020] The aerostatic thrust bearing includes a supported part 1, a bearing body 2 and a smooth plane 3;

[0021] The bearing body 2 is provided with an air inlet 4, an annular groove 5, a plurality of throttle holes 6, a plurality of air cavities 7, a bearing working surface 8 and a pressure equalizing groove 9; the bearing body 2 also has an upper plane 12; the air cavity 7 is provided with an inlet port connected to the throttle hole 6 and a jet port located on th...

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Abstract

The invention discloses an aerostatic thrust bearing comprising a bearing body, wherein the upper part of the bearing body is provided with an air inlet, a ring slot, an orifice and an air cavity, wherein the orifice is communicated with the ring slot; an included angle between the wall surface of the air cavity and an orifice axis is an orifice jet divergence angle theta which can avoid the inherent edge corner vortex problem of the traditional square or round air cavity; the change of the shape of a runner on the air cavity is utilized to alleviate pressure loss caused by overquick air speed increase and maintain high pressure in a bearing gas, thereby improving bearing carrying capacity and stability; and the orifices are communicated by a pressure equalizing slot to enhance the bearing carrying capacity and stability. The aerostatic thrust bearing is mainly used for designing moving parts in equipment, such as photoetching machines, three dimensional measuring machines and the like and belongs to the technical field of ultra-precise movement and ultra-precise measurement.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision movement and ultra-precision measurement, and relates to an aerostatic pressure thrust bearing, which is mainly used for the design of moving parts in photolithography machines, three-coordinate measuring machines and other equipment. Background technique [0002] Aerostatic thrust bearings have a series of advantages such as no wear, low friction, no creeping at low speeds, and high motion precision, so they are widely used in the fields of ultra-precision motion and precision measurement, but at the same time, they also have low rigidity, low load-carrying capacity, and poor stability. shortcoming. [0003] Existing aerostatic thrust bearings usually use small hole throttling, high-pressure gas enters the air cavity through the small hole restrictor, and then enters the bearing gap from the edge of the air cavity; the pressure in the air cavity gradually decreases along the bearing gap, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C32/06
Inventor 李金龙胡松赵立新
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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