Movable false tooth type flexible microelectrode applicable to facial paralysis rehabilitation
A technology of micro-electrodes and dentures, applied in the field of medical devices, can solve problems such as limited practical significance, inability to function of facial muscle groups, etc., and achieves the effects of convenient wearing, simple structure, and function recovery.
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[0028] The specific preparation process of this embodiment is as follows: first deposit 3μm-5μm polychlorinated paraxylene (Parylene-C) film on the Si wafer, and then spin 0.01mm-1mm polydimethylsiloxane (PDMS), 80 Dry for 4 hours at ℃ to form the structural layer. Then, the 5μm positive glue is sputtered and patterned, and the seed layer of precious metals (including Pt, Ir, Au, etc.) is sputtered, 100-15000 angstroms, and the lift-off process is used to remove the photoresist and pattern the seed layer to form the electrode circuit layer. Then, shake the PDMS of 0.01mm-1mm, dry at 80℃ for 4 hours, then deposit Parylene-C of 3μm-5μm, pattern the photoresist for the second time, and use reactive ion etching (mE) to etch the Parylene-C Engrave through to expose the electrode points to form a covering layer.
[0029] Such as Figure 1-Figure 3 As shown, the movable denture type flexible microelectrode for facial paralysis rehabilitation prepared in this embodiment includes: a stru...
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