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Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer

A micro-accelerometer, accelerometer technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, acceleration measurement using gyroscope, etc. problem, to achieve the effect of convenient driving comb teeth and driving feedback comb teeth, reducing nonlinearity, and suppressing common mode interference

Inactive Publication Date: 2011-08-10
SOUTHEAST UNIV
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Problems solved by technology

However, at present, most institutions are developing uniaxial silicon microresonant accelerometers, and a few institutions have conducted preliminary theoretical and experimental discussions on biaxial silicon microresonant accelerometers. Existing biaxial silicon microresonant accelerometers have crossover Disadvantages such as large axis coupling, poor performance consistency of the two detection axes, and large volume

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  • Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer

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Embodiment Construction

[0016] Below in conjunction with the accompanying drawings and specific embodiments, the present invention will be further clarified. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. Modifications of equivalent forms all fall within the scope defined by the appended claims of this application.

[0017] like figure 1 As shown in the figure, the dual-axis integrated fully decoupled silicon micro-resonant accelerometer of the present invention is used to measure the acceleration input along two vertical directions in the same plane. In the micro-accelerometer structure, the lower layer is the signal lead made on the glass base 16 . The upper mechanical structure of the microaccelerometer consists of a mass 1 and four identical and symmetrically distributed resonator substructures 2a, 2b, 2c, and 2d. The mass 1 is connected to the four resonator substructures through four sets of...

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Abstract

The invention discloses a dual-axle integrated fully-coupled silicon micro-resonance type accelerometer which comprises an upper-layer micro accelerometer structure and a lower-layer glass base, wherein the micro accelerometer structure is bonded on the glass base, the glass base is provided with a signal lead, an electrode of the micro accelerometer structure is connected with a corresponding signal lead, and the micro accelerometer structure comprises a mass block and four completely same resonator substructures. The dual-axle integrated fully-coupled silicon micro-resonance type accelerometer adopts frequency detection, and two detecting axles are fully coupled and arranged symmetrically; and the dual-axle integrated fully-coupled silicon micro-resonance type accelerometer has the advantages of simple and compact structure, small volume and high accuracy.

Description

technical field [0001] The invention belongs to the technical field of micro-electronic mechanical system and micro-inertial measurement, and particularly relates to a silicon micro-resonance accelerometer. Background technique [0002] Silicon micro-accelerometers have the characteristics of small size, light weight, low cost, low energy consumption, high reliability, easy digitization, and can meet harsh environment applications. They have important military value and broad application prospects. Most of the silicon micro-accelerometers use the capacitive detection method, which has the advantages of small temperature drift, high sensitivity, good reliability and good stability. And the resolution is greatly reduced, and the capacitance detection method is greatly affected by parasitic effects, mechanical structure noise, circuit noise, etc., and has basically reached the limit of the detection ability, and it is very difficult to further greatly improve the measurement ac...

Claims

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Application Information

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IPC IPC(8): G01P15/18B81B3/00G01P15/14
Inventor 杨波殷勇黄丽斌王寿荣李宏生陈卫卫
Owner SOUTHEAST UNIV
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