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Method for preventing liquor from being diluted and protecting surface of silicon wafer

A silicon wafer surface and liquid medicine dilution technology, applied in chemical instruments and methods, crystal growth, renewable energy products, etc., can solve problems affecting the surface quality of silicon wafers, achieve protection from corrosion, good effect, reduce chemical The effect of liquid dosage

Active Publication Date: 2013-04-24
盐城天合国能光伏科技有限公司
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Problems solved by technology

During the cleaning process of the silicon wafer, due to the needs of the process, some acid-base solution is used as the liquid medicine. Since not the whole silicon wafer is immersed in the liquid medicine, the liquid medicine and the silicon wafer will react to produce some Gas, which will corrode the surface of the silicon wafer exposed to the chemical solution and affect the surface quality of the silicon wafer

Method used

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Embodiment Construction

[0013] The present invention will now be further described in conjunction with specific examples, and the following examples are intended to illustrate the present invention rather than further limit the present invention.

[0014] A method for preventing dilution of medicinal liquid and protecting the surface of a silicon wafer, comprising the steps of:

[0015] The first step, before the silicon wafer enters the cleaning tank, spray deionized water on its surface, the dosage is 10ml~15ml;

[0016] The second step is to pass the silicon wafer with deionized water on the surface through the gap between the two rollers, and the liquid carrying capacity on the surface of the silicon wafer is 6-8g;

[0017] The third step is to use a scraper to scrape off the deionized water on the surface of the silicon wafer that is about to be immersed in the chemical solution.

[0018] The invention adopts a hanging chain cleaning machine to clean the silicon chip, which is a fully automatic...

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Abstract

The invention relates to a method for preventing liquor from being diluted and protecting the surface of a silicon wafer, which comprises the following steps: before a silicon wafer is moved into a cleaning tank, jetting de-ionized water onto the surface of the silicon wafer; then, passing the silicon wafer of which the surface is provided with the de-ionized water through a clearance formed between two rollers; and finally, using a scraper to scrape the de-ionized water on the surface of the silicon wafer, which is to be immersed in liquor. By using the method provided by the invention, the surface of the silicon wafer can be better protected from corrosion in the silicon wafer cleaning process, the liquor is prevented from being diluted, and the consumption of the liquor is reduced.

Description

technical field [0001] The invention relates to the technical field of solar cell manufacturing, and provides a method for preventing the dilution of medicinal liquid and protecting the surface of a silicon wafer. Background technique [0002] At present, the semiconductor industry generally uses a hanging chain cleaning machine to clean silicon wafers, so that the cleaning quantity is large and the speed is fast. During the cleaning process of the silicon wafer, due to the needs of the process, some acid-base solution is used as the liquid medicine. Since not the whole silicon wafer is immersed in the liquid medicine, the liquid medicine and the silicon wafer will react to produce some Gas, which will corrode the surface of the silicon wafer exposed to the chemical solution and affect the surface quality of the silicon wafer. Contents of the invention [0003] The technical problem to be solved by the present invention is: in order to overcome the deficiencies of the pri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B33/10H01L31/18
CPCY02P70/521Y02P70/50
Inventor 杨延德叶权华杨文侃
Owner 盐城天合国能光伏科技有限公司
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