Square electromagnetic cold crucible for continuous melting and organizational control of polycrystalline silicon

Abstract

The invention relates to a square electromagnetic cold crucible, in particular to a square electromagnetic cold crucible for continuous melting and organizational control of polycrystalline silicon, which aims to solve the problems that the crucible loss is too high, a newly-formed silicon bulk is probably stuck in the cavity of the crucible, the continuous melting process can terminate easily, the electromagnetic force is too concentrated and the organizational control effect is poor as a result of the small cavity size of the existing electromagnetic cold crucible. The square electromagnetic cold crucible comprises a crucible body, a water inlet pipe, a water outlet pipe, a plurality of thin water pipes and an induction coil, wherein the crucible body is composed of an upper half body and a lower half body; the induction coil is sleeved on the upper half body; the cross section of the crucible body is a square ring-shaped cavity; the upper half body is divided into 16 cylinders of which the cross sections are petal-like; the bottom surface of the lower half body, corresponding to the positions of through holes of the cylinders with the petal-like cross sections, is provided with longitudinal blind holes; and each blind hole is communicated with the water outlet pipe. The square electromagnetic cold crucible is used for continuous melting and organizational control of polycrystalline silicon particles.

Description

technical field [0001] The invention relates to a square electromagnetic cold crucible, in particular to a square electromagnetic cold crucible for continuous melting and tissue control of polysilicon. Background technique [0002] The cold crucible is a crucible made of water-cooled pure copper. Since the crucible is a water-cooled structure, the temperature of the crucible is very low during use, so the crucible itself has almost no pollution to the materials in the crucible. According to the different heating methods of the crucible, it can be divided into Non-slit external heating crucible and slotted induction heating crucible, external heating cold crucible relies on the energy generated by the energy generator to melt materials, while induction melting cold crucible relies on induction heating to melt materials, also known as electromagnetic cooling The crucible is a cold crucible that is widely used at present. It puts the split water-cooled copper crucible in the al...

AI Technical Summary

Problems solved by technology

[0003] The present invention solves the problem that the existing electromagnetic cold crucible has too much loss due to the small inner cavity, the newly formed silicon ingot is easily stuck in the crucible cavity, the continuous melting process is easily terminated, and the electromagnetic force is too concentrated, resulting in poor tissue control effect. Good question, and then propose a square electromagnetic cold crucible for continuous melting and texture control of polysilicon

Images