Novel spherical absolute measurement system and method thereof

Abstract

The invention discloses a novel spherical absolute measurement system and a method thereof, wherein the system comprises a computer, a light source, a light splitting unit, a filter, a standard object lens, a measured spherical reflecting mirror, an electro-control translation stage and a data acquisition and transmission unit; the method comprises the steps of: at first, adjusting the confocal location of the measured spherical reflecting mirror on the standard object lens by the electro-control translation stage, controlling a Fizeau interferometer by the computer to perform surface detection on the measured spherical reflecting mirror once and then storing the detection data in the computer, then controlling the electro-control translation stage by the computer to enable the measured spherical reflecting mirror to generate, around the focal point, confocal shears of lambda y and lambda y in relation to an optical axis of the interferometer, and using the interferometer to perform two detections respectively and storing the detection data of the two detections in the computer, and separating the surface data of the measured spherical reflecting mirror from errors of system and reference surface by data processing software in the computer among the three detected surface data so as to obtain the absolute surface information of the measured optical mirror surface.

Description

technical field [0001] The invention belongs to the technical field of advanced optical detection, and relates to an optical detection system, especially a high-precision optical mirror absolute surface shape detection system and method. Background technique [0002] The rapid development of modern optical manufacturing industry is closely related to the continuous improvement and update of optical detection technology. The traditional optical interference detection is to use visual or photographic methods to estimate the interference fringes, and evaluate the surface error (wave aberration) of the detected wave surface or the imaging quality of the tested optical system according to the deformation of the interference fringes. Generally, the accuracy of visual estimation is λ / 10, and the estimated fringe deformation also includes the systematic error of the interferometer itself, which is not entirely the actual error of the detected surface. [0003] Fizeau-type Zygo inte...

AI Technical Summary

Problems solved by technology

[0006] To sum up, although there are many theoretical studies on high-precision spherical surface shape detection in foreign countries, these methods of absolute spherical surface detection have their own shortcomings, and it is difficult to be practically used for high-precision spherical surface inspection.

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