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Novel microplasma device containing floating electrode

A technology of micro-plasma and floating electrodes, which is applied in the direction of AC plasma display panels, solid cathode components, gas discharge tubes/containers, etc., to achieve the effects of fewer process steps, simple structural design, and easy production

Inactive Publication Date: 2011-06-01
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] For micro-plasma display devices (MPDs) with smaller device sizes, most of the research at this stage is focused on device fabrication and array add

Method used

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  • Novel microplasma device containing floating electrode
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  • Novel microplasma device containing floating electrode

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Embodiment Construction

[0026] refer to figure 1 , first anneal the aluminum foil in the early stage to remove impurities and defects on the surface of the aluminum foil, so that the structure of the aluminum foil can be recrystallized, the grains can grow, and the crystallization performance can be improved. Then the annealed aluminum foil was treated in sequence: rinse with deionized water, ultrasonic degreasing with acetone, and rinse with deionized water to ensure the purity of the aluminum foil surface. Then, the aluminum foil is adhered to the rear substrate glass 170, and photolithography is carried out on the aluminum foil according to the previously prepared mask to carve a pattern similar to figure 1 The microcavity pattern window shown in , the pattern includes: round holes 120 at both ends and rectangular through grooves 121 . Afterwards, two electrochemical corrosions were carried out in hydrochloric acid solution to obtain the microcavity array. After the photolithographic etching pro...

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Abstract

The invention discloses a novel microplasma device containing a floating electrode. An aluminum foil is adopted in the device as a material base; dense array micro-cavities are arranged on the aluminum foil; the inner part of each micro-cavity is provided with an alumina layer as a medium layer so that a basic Al/Al2O3/Al coplanar electrode structure can be formed; both ends of each micro-cavity are relatively larger than the middle part in size; alumina exists only between both ends of each micro-cavity; pure aluminum remains between adjacent micro-cavities as the floating electrode so that an integral micro-cavity array is formed; simultaneously the two partial aluminum foil bases insulated at the upper and the lower sides of each micro-cavity are used as the electrodes of the device; after the upper and the lower electrodes are guided out, the whole base is sealed and vacuumized with glass so as to obtain the final novel microplasma device containing the floating electrode. The device is simple in structure and convenient to manufacture, can reduce the minimum sustaining voltage of discharging, and the luminescent efficiency is improved.

Description

technical field [0001] The invention relates to a micro-plasma device with a coplanar electrode structure. The structure contains a floating electrode, which greatly improves the overall performance of the device. Background technique [0002] Microcavity Plasma Devices (MPD) are characterized by small microcavity size and high discharge pressure. It is precisely because of these two characteristics that MPD has many unique discharge characteristics, which has become one of the main research hotspots. [0003] Since White first proposed micro-hollow cathode glow discharge in 1959, micro-plasma has made great progress. The original microcavity plasma device was developed from the micro hollow electrode device, so the early micro plasma is usually called hollow electrode discharge. [0004] There are many structures of microplasma devices, the most commonly used is the metal / dielectric / metal three-layer structure, and many researches on discharge characteristics are based on...

Claims

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Application Information

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IPC IPC(8): H01J17/49H01J17/04H01J17/20H01J11/10H01J11/34H01J17/16
Inventor 梁志虎张小宁何兆王含刘纯亮
Owner XI AN JIAOTONG UNIV
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