MEMS (micro electro mechanical system) silica-based micro-hotplate provided with thermal insulation channels and processing method of MEMS silica-based micro-hotplate

Abstract

The invention relates to the field of silica-based micro-hotplates, and discloses an MEMS (micro electro mechanical system) silica-based micro-hotplate provided with thermal insulation channels and a processing method of the MEMS silica-based micro-hotplate. The MEMS silica-based micro-hotplate comprises a monocrystal silicon substrate, the thermal insulation channels, a lower insulation layer, a heating layer and an upper insulation layer, wherein one or more groups of thermal insulation channels with certain depths are formed in the upper surface of the monocrystal silicon substrate, and each group of channels comprises a plurality of parallel straight channels; the thermal insulation channels and the upper surface of the monocrystal silicon substrate are covered with the lower insulation layer; and the heating layer and the upper insulation layer are arranged above the lower insulation layer. According to the micro-hotplate, a film on the lower insulation layer as well as the heating layer and the upper insulation layer above the film on the lower insulation layer can be stably supported by the thermal insulation channels, and the heating layer is prevented from falling off due to the fact that the lower insulation layer deforms and warps during high-temperature work of a device; and meanwhile, the surfaces of the thermal insulation channels are covered with the silicon dioxide film, the silicon dioxide film can have a better thermal insulation effect, the detection sensitivity of the micro-hotplate is increased, and the service life is prolonged.

Description

technical field [0001] The invention relates to a silicon-based micro-hot plate, in particular to a MEMS silicon-based micro-hot plate with heat-insulating grooves and a processing method thereof. Background technique [0002] A micro-hotplate is a common heating platform used to heat a component on it to keep the component at the desired operating temperature. At present, silicon-based micro-hotplates have been widely used in micro-devices such as micro-gas sensors, thin-film calorimeters, micro-accelerometers, and barometers. The basic structure of a micro-hotplate includes a suspended dielectric film and thin-film resistor strips. When the current passes through the thin-film resistor strip, part of the Joule heat generated by the resistance is used to heat the micro-hotplate, and the other part is dissipated in the surrounding environment by conduction, convection and radiation. [0003] Micro-hotplates based on silicon micromachining technology are made by micro-proce...

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Problems solved by technology

[0009] (2) The heat insulation effect is poor, and the air gap between the heat insulation tanks is large, resulting in faster heat loss, which affects the heat insulation effect

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