Piezoelectric valve
A valve and piezoelectric technology, applied in the direction of valve details, valve devices, valve operation/release devices, etc., can solve the problems of insufficient control accuracy, low pressure resistance, large volume and quality, etc., and achieve compact structure, reduced The effect of volume and mass
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[0050] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0051] The piezoelectric valve designed by the present invention adopts a micro-manufacturing process to manufacture the key sealing parts spool 410 and valve seat 411 in the valve body assembly 4, and the rest of the valve body assembly 4 is manufactured using a traditional manufacturing process; a flexible support is manufactured using a traditional manufacturing process T-shaped flexible member 25 in 2, and three hinges. The sealing key parts made by the micro-manufacturing process overcome the difficulty of the small displacement of the piezoelectric actuator 5, and can ensure that the valve body assembly 4 has good sealing performance and high control accuracy, and can reduce the valve body to a certain extent. The volume and quality of the body assembly 4; the flexible bracket 2 and the rest of the valve body assembly 4 made by tradition...
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