Speckle restraining device for laser light source based on MEMS (micro-electromechanical systems) technology
A laser light source and suppressing device technology, applied in the direction of light guides, optics, optical components, etc., can solve the problems of poor speckle elimination effect, complex structure, and high cost, and achieve good speckle elimination effect, speckle elimination, and low cost low effect
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[0013] Such as figure 1 As shown, the speckle suppression device for laser light sources based on MEMS technology includes a planar optical waveguide splitter 2 processed on a glass substrate 1 by applying MEMS processing technology, and placed on the output waveguide side of the planar optical waveguide splitter 2, A converging lens 3 for converging the output beams of the planar optical waveguide splitter 2, the planar optical waveguide splitter 2 is a planar optical waveguide splitter with a 1×N structure, N≥2, and the planar optical waveguide splitter Each output waveguide of the device 2 is respectively integrated with a phase modulation device 4 .
[0014] Such as figure 2 As shown, the planar optical waveguide splitter of the 1×N structure is composed of several Y-branch structure splitter cores (that is, 1×2 structure splitters), and part or all of the output waveguides of the splitter cores A phase modulation device 4 is integrated on it.
[0015] The phase modula...
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