High-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing

Abstract

The invention discloses a high-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing, which comprises a substrate, an insulating layer, a coil, electrodes, spring platforms, support seats and a permanent magnet. The harvester is characterized in that the coil is attached to a surface of the substrate, the head and the tail of the coil are respectively connected with two electrodes, the upper surface of the substrate is covered by the insulating layer, the coil is cladded inside the insulating layer, and the two electrodes are arranged on the insulatinglayer; and a plurality of support seats are attached to the upper surface of the insulating layer and are provided with the spring platforms, the spring platforms are arranged right above the coil, gaps exist between the spring platforms and the coil, and the spring platforms are fixedly connected with the permanent magnet. The invention realizes high integrated manufacturing of the harvester; atthe same time, the permanent magnet obtained by duplication via a micro die has higher thickness and magnetic property compared with a galvanized or sputtering permanent magnet material, thus vibrational energy can be more effectively converted into electrical energy.

Description

technical field [0001] The invention relates to the field of vibration energy harvesters, in particular to a high-performance miniature electromagnetic vibration energy harvester that is easy to be integrated and manufactured. Background technique [0002] The continuous advancement of semiconductor manufacturing technology has led to the development of electronic devices and products in the direction of miniaturization. The emergence of Bluetooth technology and low-power communication standards (such as Zigbee and IEEE802.15.4) has largely promoted the development of miniature wireless sensor networks and communication nodes. Due to the characteristics of low energy consumption, small size, large function, and mass production, MEMS is also developing rapidly. However, compared with the ever-shrinking size of wireless sensing products and MEMS devices, power supply issues are becoming a big obstacle to their development. In addition, with the continuous development of new m...

AI Technical Summary

Problems solved by technology

However, this design uses Deep Reactive Ion Etching (DRIE) to fabricate silicon cantilever beams, and the manufacturing cost is high. More importantly, the permanent magnets need to be manually bonded to the Pyrex glass. Ease of integrated manufacturing

In addition, the patent "Miniature Electromagnetic Energy Harvester and Preparation Method" (Application No. 200910080541.9) applied by Yuan Quan et al. in March 2009 uses the method of electroplating permanent magnets, which improves the damage caused by manual bonding of permanent magnets to a certain extent. Inconvenient, however, electroplating permanent magnet materials is extremely difficult in micromachining, not only the electroplating conditions are difficult to control, but also its thickness is very thin, so that the generated magnetic field is very weak, the magnetic performance is poor, and the collected vibration energy cannot be effectively converted into electrical energy

Images