Microresonator temperature control system

Abstract

The invention provides a novel temperature control system suitable for microresonators. The microresonator temperature control system is composed of a microresonator, a microresonator drive circuit, a temperature control circuit and a temperature executive component, wherein the microresonator adopts a pectinate resonator structure; the microresonator drive circuit adopts an automatic gain control mode; the microresonator drive circuit and the microresonator form a closed loop circuit; the microresonator drive circuit ensures that the microresonator generates stable oscillating signals; the temperature control circuit measures the signals of the microresonator drive circuit as the temperature changes, and outputs the signals to the temperature executive component after calculation and amplification; and the temperature executive component ensures the temperature of the microresonator to be constant under the action of the temperature control circuit. By utilizing the inherent temperature characteristics of the Q value of the microresonator, the invention does not need a temperature sensor, thereby reducing volume and cost of the temperature control system, enhancing precision of temperature detection and shortening response time of the temperature control system.

Description

technical field [0001] The invention belongs to the technology for temperature control of micro-system components, in particular to a micro-resonator temperature control system. Background technique [0002] A microresonator is a typical microsystem (MEMS) device with a wide range of applications. Micro-resonators can not only replace quartz crystal oscillators as micro-frequency sources, but also are key structural components of micro-sensors and micro-actuators such as micro-resonant accelerometers, micro-resonant gyroscopes, and micro-clamps. key structure. Microresonators have the characteristics of small size, low cost, impact resistance, and mass processing. [0003] Microresonators are generally made of silicon and manufactured using semiconductor processing techniques. Under the action of excitation, the microresonator oscillates at the natural frequency point and outputs a stable frequency signal. Since silicon is a temperature-sensitive material, the natural fr...

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Problems solved by technology

This method utilizes the inherent characteristics of the microresonator and does not require a temperature sensor, so that the temperature control system has the advantages of small size, low cost, high precision, and short response time. There is nonlinearity between the driving voltage and the driving displacement of the microresonator, and the microresonator driving circuit is a limiting driving circuit, so the driving signal input to the microresonator is a constant limiting signal, so the oscillation amplitude of the microresonator cannot be automatically controlled by the environment. The adjustment is susceptible to interference, and its heating wires are only distributed on one side of the microresonator, which has the problems of heating asymmetry and long thermal equilibrium time

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