Temperature field simulation device with substrate micro/nano film

Abstract

The invention relates to the fields of nano material force and heat property researches and MEMS (Micro-electromechanical Systems) micro / nano film device experiments and tests, in particular to a temperature field simulation device with a substrate micro / nano film. In order to scientifically and reasonably simulate a temperature field of an MEMS micro / nano film device in a working environment and provide a new method for heating a film substrate structure test piece, the invention adopts the technical scheme that the a temperature field simulation device with a substrate micro / nano film comprises a clamp, a heat conductive adhesive, a foil-type resistor used as a heating source, a thermoelectric couple used for measuring the temperature of the test piece and a temperature controller for controlling the foil type resistor according to the output of the thermoelectric couple; the front surface, the back surface and the lower surface of the test piece are set to be heating surfaces, the left surface and the right surface are set to be clamping surfaces of the clamp, and the top surface is set to be a film plating surface; the clamp is made of metal; the foil type resistor forms an electric heating piece; the heat conductive adhesive is coated on the electric heating piece; and the front surface, the back surface and the lower surface of the test piece are pasted on the electric heating piece through the heat conductive adhesive. The invention is mainly applied to the force and heat property researches of nano materials.

Description

technical field [0001] The invention relates to the field of mechanical and thermal performance research of nanometer materials, experiment and testing of MEMS micro-nano thin film components, in particular to a temperature field simulation device with a substrate micro-nano thin film. Background technique [0002] Nanotechnology is a new science developed from the late 1980s to the early 1990s. Since then, it has attracted great attention both at home and abroad, especially in nanomaterials. The significance of nanotechnology will first of all promote the revolution of human cognition, and at the same time trigger a new industrial revolution, which will have a major impact on our country's society, economy and national security. [0003] Nano-film refers to a substance that has only one dimension in the nanoscale and the other two dimensions are not in the nanoscale. It is composed of molecules or grains spread evenly to form a film, which can be ultra-thin film, multi-laye...

AI Technical Summary

Problems solved by technology

With the wide application of thin film / substrate systems in MEMS and microelectronics technology, more and more attention has been paid to their mechanical and thermal properties. Many scholars have done a lot of work in this area, but there are still many problems that have not yet been resolved.

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