Low gas consumption detection method of pressure helium leakage detector

Abstract

The invention relates to a detection method of work pieces such as semiconductor photoconducting devices and the like with air tightness requirements, in particular to a low gas consumption detection method of a pressure helium leakage detector. The method sequentially comprises the following steps: a. placing a solid pad block with the certain size at the bottom of a pressure container of the pressure helium leakage detector before detection; b. placing devices to be detected into the pressure container to pump the vacuum to minus 0.1 MPa pressure; c. opening a valve of a helium gas steel cylinder to inflate dry helium gas into the pressure container until the pressure value meeting the process requirements of the devices to be detected is reached; d. releasing the pressure after 2 hours of pressure maintaining on the pressure container; and e. taking out the devices to be detected for being blown for 2 minutes in nitrogen gas and then putting the devices to be detected into a helium gas mass spectrograph for leakage rate test. The method of the invention is used for the air tightness detection on the devices with small sizes, because the space in the pressure container during the detection is reduced, the inflation quantity of the helium gas can be reduced, and the detection cost is saved. At the same time, the time required by vacuum pumping and helium gas inflation in the detection process is also greatly shortened, so the detection efficiency is improved.

Description

technical field [0001] The invention relates to a detection method for semiconductor optoelectronic devices and other workpieces requiring air tightness, in particular to a low gas consumption detection method for a helium pressure leak detector. Background technique [0002] As an effective means of judging whether there is air leakage, the leak detection test is widely used in the field of semiconductor optoelectronic devices, or other fields that require leak detection for semi-finished products and products, and is used for sealing devices or other airtight requirements. The workpiece is tested for air tightness. This type of detection is usually carried out in a pressure helium leak detector. The device to be tested is placed in a pressure vessel, first evacuated, and then filled with high-pressure helium. After maintaining the high pressure for a certain period of time, the device is taken out and put into a helium gas spectrometer for detection. The instrument measur...

AI Technical Summary

Problems solved by technology

The pressure vessel of the leak tester takes into account the different compatibility requirements of different devices under test. Generally, the volume of the container is 1 to 10 times the volume of the actual measured device. When the device under test is small, it needs to be filled with There is more helium, which causes waste of helium and increases the detection cost