Piezoelectric type six-dimensional force sensor

Abstract

The invention relates to a piezoelectric type six-dimensional force sensor which comprises a base, a force and moment measurement meter, a cover, a signal lead and an insulated filling material, wherein the base is internally provided with a subpanel and a socket, and the force and moment measurement meter is clamped by an upper insulated plate electrode and a lower insulated plate electrode and is installed on the subpanel in the base. In the invention, the force and moment measurement meter is formed only by eight quartz wafers, and the eight quartz wafers are respectively four cut quartz wafers with Y0 degrees and four cut quartz wafers with X0 degrees. The information of three-dimensional force and three-dimensional moment to be measured can be obtained by carrying out additive operation and / or subtractive operation after the output signals of the eight quartz wafers are collected. Except for the advantages that the invention still can keep dimensionless coupling and does not need decoupling operation, the invention also has the advantages of simple structure and requirement reduction of a processing process because the quartz wafers used by the invention are greatly reduced, so that the invention is especially suitable for the processing of an MEMS process and realizes the miniaturization of the piezoelectric type six-dimensional force sensor.

Description

technical field [0001] The invention belongs to a piezoelectric sensor, in particular to a piezoelectric sensor of six-dimensional force. Background technique [0002] The six-dimensional force sensor is a sensor that measures three-dimensional force and three-dimensional torque in space. The well-known six-dimensional force sensor can be mainly divided into three categories: the first type is to install the sensing element (strain gauge, thick film force sensitive The structure of resistance, photoelectric displacement sensor, etc.), the deformation of the elastic body is detected by the sensing element to reflect the measured six-dimensional force information. Because of the existence of the elastic body, this kind of six-dimensional force sensor causes the existence of the structure: the complexity of the elastic body structure There are three bottleneck contradictions: the contradiction between decoupling and decoupling, the contradiction between high natural frequency a...

AI Technical Summary

Problems solved by technology

[0002] The six-dimensional force sensor is a sensor for measuring three-dimensional force and three-dimensional torque in space. The known six-dimensional force sensor can be divided into three categories: the first category is to install sensing elements (strain gauges, thick film force sensors, etc.) on elastic bodies. resistance, photoelectric displacement sensor, etc.), the sensor element detects the deformation of the elastic body to reflect the measured six-dimensional force information. This type of six-dimensional force sensor is due to the existence of the elastic body, resulting in the existence of the structure: the complexity of the elastic body structure The contradiction between decoupling, the contradiction between high natural frequency and high sensitivity, the contradiction between the quality of elastic body and the difficulty of decoupling and other three bottleneck contradictions

The second type is a parallel structure based on the working principle of the Stewart platform. The strain element is installed on the support rod of the platform or on the elastic moving pair (or the piezoelectric element is installed on the support rod). Consistency requirements are high, the spatial structure is complex, the size is large, and it is difficult to miniaturize

The third category is to install eight or two multi-dimensional piezoelectric force sensors on the rigid body force transmission mechanism (for example: Chinese patent ZL2007100781415 "Differential Piezoelectric Six-dimensional Force Sensor", ZL2007100786847 "A Piezoelectric Six-dimensional Force Sensor" sensor"), the external force information is directly applied to each sensor through the rigid body force transmission mechanism. Since the sensor of this structure does not have an elastic body for measuring the external force, it can well overcome the bottleneck caused by the existence of the elastic body. This type of six-dimensional force sensor has high requirements for the installation accuracy of each sensor, and high requirements for the consistency of the same type of sensor. Due to the quality of the rigid force transmission mechanism, the measurement accuracy of this type of sensor will also be affected by the acceleration when it is applied in the acceleration field. Impact

The technical solution provided by the Chinese patent ZL2008100697208 "A Flat-plate Piezoelectric Six-dimensional Force Sensor" overcomes the influence of the rigid body force transmission mechanism on the performance of the third type of sensor. This solution is also particularly beneficial to the miniaturization of the six-dimensional force sensor. That is to say, it can be realized by using the MEMS process scheme, but because this technical scheme needs to install sixteen piezoelectric quartz wafers, the requirements for its positioning accuracy are relatively high, which is a challenge for the miniature of this flat piezoelectric six-dimensional force sensor. posed greater difficulties

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