Silicon capacitance intelligent pressure/differential pressure transmitter and a measurement method thereof
A technology of differential pressure transmitter and silicon capacitor, which is applied in the direction of fluid pressure measurement using capacitance change, pressure difference measurement between multiple valves, and measurement devices, which can solve the loss of accuracy, increase cost, and poor stability of measurement signals and other issues to achieve the effect of increasing stability and measurement accuracy
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[0039] Such as Figure 1~3 As shown, the silicon capacitor intelligent pressure / differential pressure transmitter includes: a silicon capacitor pressure sensor, a time-to-digital conversion circuit, a single-chip microcomputer, a memory, an intelligent display unit, a D / A conversion part and a Hart protocol processing circuit; the silicon capacitor The pressure sensor is used to convert the external pressure change signal into a capacitance change value; the input end of the time-to-digital conversion circuit is connected to the output end of the silicon capacitance pressure sensor, which periodically charges and discharges the silicon capacitance pressure sensor and Record the charging and discharging time, and then convert the charging and discharging time into a digital signal; the signal input terminal of the single-chip microcomputer is connected to the signal output terminal of the time-to-digital conversion circuit; the signal output terminal of the single-chip microcomp...
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