Filtering phase discriminator type dynamic interferometry system
A dynamic interferometric measurement system technology, applied in the field of optical interferometric measurement systems, can solve problems such as increasing measurement time and reducing resolution, and achieves the effects of eliminating high-frequency interference, simple phase shifting, and high precision
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[0017] In order to further illustrate the above-mentioned purpose, technical scheme and effect of the present invention, the invention will be described in detail below through examples in conjunction with the above-mentioned figures. Please see first figure 1 As shown, it is a vibration-resistant Fizeau interferometry device.
[0018] Among them, the laser is used as the light source 1, and it and the beam splitter 2, the collimating beam expander mirror 3, the reference mirror 4, the phase shifting device 5 (PZT1, PZT2, PZT3), the measured object 6, the diaphragm 7, the lens 8, and the CCD Photodetectors 9 are sequentially placed in the optical path.
[0019] The light emitted by the laser passes through the beam splitter 2, the collimating beam expander mirror 3, and the reference mirror 4 in turn, and is projected onto the surface of the object 6 to be measured. The reflected light passes through the reference mirror 4 and meets the reflected light from the front surface ...
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