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Solar selective absorbing coating and preparation method thereof

An absorbing coating and selective technology, applied in solar thermal power generation, coating, solar thermal devices, etc., can solve the problem of high cost and achieve the effect of stable coating performance

Active Publication Date: 2010-03-03
HIMIN SOLAR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this invention patent, metal titanium is used to prepare the metal in the absorbing coating, and the cost is relatively high

Method used

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  • Solar selective absorbing coating and preparation method thereof
  • Solar selective absorbing coating and preparation method thereof
  • Solar selective absorbing coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Cu / Al / SS deposition on glass tubes 1 -O x1 -AlN y1 o z1 / SS 2 -O x2 -AlN y2 o z2 / AlN i o j Selective Absorbent Coating:

[0033] exist figure 2 In the vacuum chamber of the cylindrical magnetron sputtering coating machine shown, the workpiece 6 is a glass tube, which can rotate and revolve. When the vacuum degree reaches 10 -3 Pa, fill pure argon gas from the argon gas inlet pipe 7, work at 0.20 Pa, Cu target 11 is DC sputtering to deposit Cu metal layer, the power is 16KW, the time is 6 minutes, and the Dektak 6M step meter of American Veeco company is used for testing. Its thickness is 150nm; then direct current sputtering Al target, deposit Al film as a diffusion barrier layer, power 12KW, time 30 seconds, use Dektak 6M step meter to measure the thickness of Al film is 22nm; then adjust the flow of argon gas to make the working pressure 0.40 Pa, according to the molar ratio of nitrogen and oxygen is approximately 97:3, N 2 The flow is 129SCCM, O 2The f...

Embodiment 2

[0037] Deposit Cu / Al / SS on polished stainless steel sheet as substrate 1 -O x1 -AlN y1 o z1 / SS 2 -O x2 -AlN y2 o z2 / SS 3 -O x3 -AlN y3 o z3 / SS 4 -O x4 -AlN y4 o z4 / AlN i o j Selective Absorbent Coating:

[0038] like figure 2 In the vacuum chamber of the cylindrical magnetron sputtering coating machine shown, the substrate stainless steel sheet is fixed on the workpiece 6, when the vacuum degree reaches 10 -3 Pa, fill the pure argon gas from the argon gas inlet pipe 7, the working pressure is 0.20Pa, the Cu target 11 is DC sputtering to deposit the Cu metal layer, the time is 6 minutes, the power is 16KW, and the thickness is 150nm as measured by the Dektak 6M step meter; Then Al target is DC sputtered to deposit Al film as a diffusion barrier layer, the power is 12KW, the time is 30 seconds, and the thickness is 22nm measured by Dektak 6M step meter; then the flow rate of argon gas is adjusted to keep the working pressure at 0.40Pa, which is approximate...

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Abstract

The invention discloses a solar selective absorbing coating which mainly consists of an infrared high reflectivity metal layer, a diffusion impervious layer, an absorbing layer and an antireflection layer in sequence; the absorbing layer is composed of a metal-medium composite material film which is expressed as SS-Ox-AlNyOz, the metal-medium composite material film is composed of metal SS molecular group, trace oxide formed by combining SS and O, and medium AlNyOz; and the antireflection layer medium material film is expressed as AlNiOj. The coating of the invention is easy to realize and simple to regulate and control in terms of preparation technique; the coating is suitable to be used in vacuum or air under low and medium temperature environment; the performance of the coating is stable; and the solar absorptance alpha thereof is more than 0.92, and the emissivity ratio thereof is less than or equal to 0.08.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and discloses a solar selective absorption coating and a preparation method thereof. Background technique [0002] The solar selective absorbing coating is mainly composed of three parts: the infrared highly reflective metal layer is the closest to the substrate, and the absorbing layer and the anti-reflection layer are in turn outward. The metal layer is made of good conductive metal materials such as aluminum, copper, silver, etc. Metal. The absorbing layer is composed of several layers of metal-dielectric composite material thin films. Nanoscale metal particles are evenly distributed in the dielectric material. Its optical properties can be controlled in the intermediate state between the metal and the medium. The sublayer of the absorbing layer near the metal bottom layer has high refraction As the metal content in each absorbing sublayer decreases, its refractive index and extinction...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34C23C16/30C23C28/00F24J2/48
CPCY02E10/40F24J2/485F24S70/225
Inventor 王智建刘建民都娜丽
Owner HIMIN SOLAR
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