Vacuum atomic force microscope and using method thereof

Abstract

The invention discloses a vacuum atomic force microscope and a using method thereof, belonging to the field of micro-topography detecting equipment; the microscope comprises an electron beam launching device, a secondary electron detector, a probe with a cantilever, a piezoelectric ceramics scanner and a feedback controller. When in work, electron beams are irradiated to the cantilever of the probe; as the acting force between the probe and sample atoms causes the cantilever to become deformed; a secondary electron signal changes; the acting force between a pinpoint and the sample is controlled to be constant by the signal feedback; the pinpoint scans the surface of the sample point by point and can image surface topography of the sample. The currently common optical lever does not need to be drawn into the invention; the invention overcomes design difficulty brought about by the conventional atomic force microscope applied in vacuum environment, synthesizes two nanophase material characterization methods which are the advantages of the atomic force microscope and an electronic microscope, and can realize the continuous measuring on the material from millimeter size to the sub-nanometer size.

Description

technical field [0001] The invention relates to a microscope device, in particular to an atomic force microscope system applied in a vacuum environment, and belongs to the field of microscopic topography detection equipment. Background technique [0002] Atomic force microscopy can image the surfaces of conductors, semiconductors, and insulators with micro-nano precision, and is a powerful characterization method in physics, chemistry, biology, and materials science. Atomic force microscopes work on the basis of atom-to-atom interaction forces. When a very sharp micro-probe at the front end of the cantilever is sufficiently close to the sample surface in the longitudinal direction to a distance of several nanometers or even smaller, an atomic force will be generated between the atoms at the tip of the micro-probe and the atoms on the sample surface. There is a certain curve relationship between the size of the atomic force and the distance, and the microscopic topography of...

AI Technical Summary

Problems solved by technology

[0005] In view of the inconvenience in the design and use of the above-mentioned existing atomic force microscope using laser positioning in a vacuum environment, the purpose of the present invention is to design a vacuum atomic force microscope, which can analyze the surface topography of various materials in its unique working mode. Continuous detection with micron-to-nano-level accuracy solves the problem of small scanning range of the microscope and difficult area scanning

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