Processing device and processing system for flat-panel display glass

Abstract

A processing device and a processing system for the flat-panel display glass based on the invention are characterized in that injection nozzles are arranged in plurality of parallel lines without overlap in a moving direction of the flat-panel display glass; in each line, an equal quantity of nozzles and the nozzles of neighboring lines are separated with an identical distance in the moving direction of the flat-panel display glass and its vertical direction separately; thus, even there are non material vibrations of the injection nozzles, an effect that the injection nozzles vibrate at an even speed along the movement of the flat-panel display glass will be obtained, such that it is capable of processing the flat-panel display glass uniformly.

Description

technical field [0001] The present invention relates to a processing device and a processing system for processing flat panel display (FPD: Flat Panel Display) glass. More specifically, the present invention relates to a novel approach to processing devices and systems that can produce effects greater than vibration without substantial vibration of the spray nozzle. Background technique [0002] As a process for processing FPD glass, there is a wetting process of cleaning, etching, developing, or degumming with a liquid cleaning solution, corrosive solution, developer, or the like. [0003] Such as figure 1 As shown, generally during this wetting process, the FPD glass 30 is moved horizontally (direction A) at a certain speed by the conveying mechanism 20, and the surface of the FPD glass is cleaned while spraying liquid substances through the nozzle nozzle 10 located on its upper part. , corrosion, development, degumming (hereinafter "processing"). [0004] As the sprayi...

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Problems solved by technology

[0008] However, in the treatment liquid spraying device based on the tube swing, not only the difference in spraying time is caused by the unevenness of the swing speed, but also the spraying width and spraying angle are not constant, and change repeatedly with the rotation of the tube. desired uniformity

[0009] Treatment liquid injection devices based on side-to-side vibration of the nozzle can achieve better results than tube rotation, but this is still the case. Figure 4b As shown, the length of time that the nozzle stays at each point of the FPD glass varies due to the non-uniform phenomenon of speed that occurs when the rotational motion of the crank by the motor is converted into the linear motion of the connecting rod.

[0010] Therefore, in order to further improve the processing uniformity, an instrument that can realize uniform linear motion is required, but there is a technical limit that cannot solve the velocity reversal at the pole.

[0011] and, if Figure 4a The conventional processing liquid spraying device as shown in the figure requires a heavy vibration of the processing liquid spraying device as a whole, and a large load is applied to vibration-related components such as motors, so failures occur frequently, and pollution occurs due to the movement of the above-mentioned components. Particles such as dust on the FPD glass, and the need to secure a space for the vibration of the injection device

[0012] The above-mentioned problems have become more serious with the increase in the size of FPD glass

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