Avalanche commutation diode special for 16000A/200-400V welding machine and preparation method thereof

Abstract

The invention relates to an avalanche commutation diode special for a 16000A / 200-400V welding machine and a preparation method thereof. The invention solves the problems that an avalanche commutation diode special for a single welding machine has small capacity and that parallel connection and flow equalization are needed during the use of the avalanche commutation diode. An N-type (100) radial single crystal silicon piece, which has specific resistance Rho n of 5-10 Ohm-cm, diameter of 70 mm and thickness of 0.17-0.19 mm, is adopted; at the temperature of 1250 DEG C, double-surface once diffusion is carried out; the surface concentration of a surface higher-concentration region of a diffusion region is 0.06-n A, a junction depth X jP is 58-62 microns, and residual minority carrier lifetime Tao p of a base region is 9-13 Mu S; cathode-anode titanium-nickel-gold undergoes ohmic contact; a cathode table surface undergoes spray sand molding, corrosion, cleaning, passivation protection andintermediate test; and a shell is arranged, the thickness of a pipe is 5-6 mm, cold pressure welding packaging is conducted under the protection of nitrogen gas, and the thickness of the pipe is 5-6mm after the packaging. The avalanche commutation diode has stronger current expansion capability, larger capacity, better quality, higher reliability and lower use cost.

Description

16000A / 200-400V welding machine dedicated avalanche rectifier diode and its manufacturing method technical field The invention relates to a power semiconductor device, in particular to a special avalanche rectifier diode for 16000A / 200-400V electric welding machine and its manufacturing method. Background technique At present, rectifier diodes for welding machines are mainly Φ63mm / 13500A / 200-400V rectifier diodes produced abroad and Φ48mm / 7000A / 200-400V rectifier diodes produced domestically. Their manufacturing method is to use N-type (111) radial low-resistance single crystal, first perform double-sided diffusion, then grind one side, and then perform single-sided diffusion. As the diameter of the silicon wafer increases, the deformation becomes more and more serious. Not only the diameter of the silicon wafer is too large, but also the thickness cannot be thinner. It is not easy to have a thickness of 63mm, a diameter of 0.21mm, and a capacity of 13500A. Increasing the...

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Problems solved by technology

The purpose of the present invention is to solve the contradiction that the current rectifier diode dedicated to a single electric welding machine has a small capacity and needs to be connected in parallel for current sharing in the use of the device, and to provide a current expansion Avalanche rectifier diode dedicated to 16000A / 200-400V electric welding machine with stronger capability, larger capacity, better quality, higher reliability and lower use cost and its manufacturing method

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