Surface transverse wave pressure and temperature sensor

Abstract

The invention relates to a surface transverse wave pressure and temperature sensor, which comprises a glass membrane sheet, a glass circular ring, a quartz crystal cantilever beam, a resonance type surface acoustic transverse wave force sensing element, a quartz crystal wafer and a resonance type surface acoustic transverse wave temperature sensing element; the glass circular ring is disposed on ametal base arranged concentric with the pressure inlet of the metal base; the glass membrane sheet is disposed on the glass circular ring; the upper surface of the glass membrane sheet has three protuberant structures; quartz crystal cantilever beams are disposed on a edge protuberant structure and the middle protuberant structure while the distance between the middle protuberant structure and the quartz crystal cantilever beam is zero; the resonance type surface acoustic transverse wave force sensing element is photoengraved on the upper surface of the quartz crystal cantilever beam; the quartz crystal wafer is disposed on the other edge protuberant structure; and the resonance type surface acoustic transverse wave temperature sensing element is photoengraved on the upper surface crystalwafer. The invention reduces sensor volume, reduces the influence of adhesion force and thermal stress to the pressure sensor, increases the mechanical oscillation property and the fatigue property of the sensor, and improves the stability and the uniformity.

Description

technical field [0001] The invention relates to a device in the technical field of sensors, in particular to a surface shear wave pressure and temperature sensor. Background technique [0002] Major traffic accidents are easily caused by car tire blowouts on expressways. If the internal pressure of the tire is too low, the tire will be deformed and the sinkage of the tire will increase. Therefore, due to the increase in friction, the temperature of the tire will rise sharply, which will cause the tire to become soft. , the intensity decreases. In addition, the overheating state will accelerate the aging and deformation of the steel wire and rubber of the radial tire, and even cause the internal fracture of the tire. These factors may produce a blowout accident. During the driving of the car, due to the deformation of the tire, the shoulder wear will be aggravated and irregular wear will appear. In addition, due to the increased friction between the tires and the ground, d...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to address the deficiencies of the prior art, to provide a surface shear wave pressure and temperature sensor, which reduces the volume of the sensor, solves the accuracy of the sensor cantilever beam fulcrum structure and reduces the pressure due to the bonding force of the thimble and the sensitive sheet connection area. The impact of sensors and other issues, increase the pressure sensitivity and uniformity of strain distribution, reduce or isolate the thermal stress of the junction area, increase the sensor's ability to withstand mechanical vibration and shock and fatigue resistance, improve accuracy, improve stability and consistency

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