High dynamic image acquisition device based on microscopic imaging detection and method thereof

Abstract

The invention relates to a high dynamic image acquisition process based on micro-imaging detection and its device, comprising a microscope and a computer system. A digital CCD image sensor is equipped on the microscope. A circular disc type optical gradient attenuator and a controller are arranged at the lower part of the object lens. Under the condition of invariant exposure time for CCD, the computer controls the rotary location for the circular disc type optical gradient attenuator sheet to take the multi-frame microscopic image with different light exposure in the same visual field and further obtain the high dynamic range image information in the scene. The invention utilizes the computer image processing technique to perform a preprocessing and blocking treatment to the sequence frame of the microscopic image with different light exposure, selects the corresponding block of different frames of the sequence microscopic image in the same position to take part in the synthesis of the high dynamic microscopic image, and finally performs the smooth and amalgamation process to the synthesis image to realize the output of the high dynamic microscopic image. The invention effectively represents the scene information in light region and dark region and improves the detecting precision of the micro-imaging detecting system.

Description

technical field [0001] The invention belongs to the technical field of high-precision microscopic imaging detection, and in particular relates to a high dynamic image acquisition device and method based on microscopic imaging detection. It is widely used in the field of laser beam fine processing, semiconductor microelectronics industry, optical communication, optical storage, aerospace industry, biochip and automatic identification of biological cells, etc. Background technique [0002] With the rapid development of science and technology, the precision of fine processing is constantly improving and the processing objects are constantly changing, which puts forward higher and higher requirements for the detection of geometric quantities of microscopic images, especially in the field of laser beam fine processing, and its products have been deeply It affects all major fields of global economic development, and microscopic image detection in semiconductor microelectronics ind...

AI Technical Summary

Problems solved by technology

[0004] At present, the imaging quality of the traditional microscopic image detection system is greatly affected by the imaging environment. Under certain lighting conditions, the dynamic range of the microscopic image acquired by the CCD is narrow, especially when the light is too bright or too dark. , it is impossible to record or express the image information of the bright and dark areas in the detection scene, and it is difficult to meet the quality requirements of micro-precision processing products in a specific detection environment, which seriously affects the accuracy and reliability of its detection

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