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Polymer SPR chip and method for making same

A polymer and chip technology, applied in the field of micro-electromechanical systems, can solve problems such as complex structure, difficult processing, and large size

Inactive Publication Date: 2009-04-01
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the selection of the above-mentioned reflective prism and the channel structure of the sample to be tested, the existing SPR chip has a large size and a complex structure, and also has defects such as difficult processing, inconvenient testing, and relatively high cost. Therefore, the current biological chip based on the SPR principle Sensing products are only used in some large laboratories

Method used

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  • Polymer SPR chip and method for making same
  • Polymer SPR chip and method for making same
  • Polymer SPR chip and method for making same

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Embodiment Construction

[0036] The following specific examples help to understand the characteristics and advantages of the present invention, but the implementation of the present invention is by no means limited to the described examples.

[0037] Polymethyl methacrylate (PMMA) or polydimethylsiloxane (PDMS) materials are used to make prisms and sample flow channels. The structure of the SPR chip is as follows: figure 2 As shown, the specific manufacturing process is as follows image 3 Shown, its preparation process steps are:

[0038] Using MEMS technology to make silicon molds, including:

[0039] Clean the silicon wafer and grow a layer of silicon nitride on the surface of the silicon wafer;

[0040] Photolithography, using ion etching to open windows, deglue, KOH etching, forming polymer optical prisms or polymer optical prism arrays and silicon molds for sample channel structures;

[0041] The PMMA or PDMS prism array is replicated by injection molding, and the base angle of the prism is ...

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Abstract

The invention provides a Surface Plasmon Resonance (SPR) chip and a preparation method thereof, belonging to the field of Micro-electro-mechanical-system (MEMS) technique; the SPR chip comprises a reflecting prism, a metal film and a sample channel structure; the prism is a polymer optical prim or a polymer optical prism array; the metal film is arranged on the back surface of the polymer optical prim or the polymer optical prism array; one or a plurality of sample channel structures corresponding to the polymer optical prism or the polymer optical prism are made of polymer material; and the sample channel structure is thermally pressed and bonded together with the polymer optical prism or the polymer optical prism. The SPR chip and the preparation method thereof prepare the polymer optical prism or polymer optical prism array and the sample channel structure by the MEMS micro-processing method, and can realize batch production. The SPR chip has low cost, and is convenient for carrying along and suitable for real-time detection and disposable usage.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and in particular relates to a surface plasmon resonance (Surface Plasmon Resonance, SPR) chip and a preparation method thereof. Background technique [0002] The 21st century is an era of interdisciplinary development, especially the development of biochips and biochemical detection technology. Sensing technology is an important means of information acquisition, and using sensing technology to obtain biological sample information is an important content of the development of biological detection technology. [0003] Among them, the optical method is considered to be the most mature and best biological testing technology due to its non-destructive and high sensitivity characteristics. Since Wood first discovered the phenomenon of surface plasmon resonance (SPR) in optical experiments, research on SPR instruments and SPR biosensors has been attracting attention. [0004] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/55G01N21/41G01N21/552
Inventor 李志宏楼夏季旭耿照新
Owner PEKING UNIV
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