Dry vacuum pump

Abstract

The invention discloses a dry vacuum pump, which relates to the vacuum technology. The dry vacuum pump comprises a base, a motor, a rotor and a stator, wherein the rotor consists of at least one level of vortex level, and the outer side of each level of vortex level is circumferentially provided with an annular groove in which blades of same height as the groove are uniformly distributed; the inner circumference of the stator is provided with vortex grooves the level number of which is the same as the level number of vortex level of the rotor; a section of a risen convex plate is arranged in the vortex groove, and each level of vortex groove and the corresponding one level of vortex level form a level extraction compressing unit; and an exhaust duct is arranged between the adjacent extraction compressing units and is positioned between the adjacent vortex grooves of the inner circumference of the stator. The dry vacuum pump is capable of discharging into atmosphere directly, and has the advantages of simple structure, few parts, easy processing and simple maintenance; meanwhile, moving pieces in the pump have no friction to a pump cavity, so the pump has almost no wear, little vibration and low noise.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to a dry vacuum pump. [0002] Background technique [0003] In recent years, people have developed various types of dry pumps, which are widely used in various fields of vacuum applications such as semiconductor industry, analytical instruments and electronics industry. Existing dry pumps can be roughly divided into dry vacuum pumps according to different mechanical structures: Roots type, Roots+claw type, screw type, scroll type, etc. Roots type and Roots + claw combined structure make the gas path long and complicated, resulting in the accumulation of condensate and the possibility of being corroded by chemical gas greatly increased. Because they are all multi-stage designs, and seals are often used between stages, there are more parts and leakage points, which makes maintenance more troublesome. Moreover, the Roots+claw type dry pump has a large external dimension and relative...

AI Technical Summary

Problems solved by technology

Roots type and Roots + claw combined structure make the gas path long and complicated, resulting in the accumulation of condensate and the possibility of being corroded by chemical gas greatly increased

Due to the multi-stage design, more seals are used between the stages, resulting in more parts and more leakage points, which makes the maintenance work more troublesome

Moreover, the Roots + claw dry pump has a large size and a large operating noise.

Screw and scroll vacuum pumps have special rotor shapes, which require high precision in processing, assembly, and positioning, and special machines must be used for processing, which has a high scrap rate, is not conducive to mass production, and has high costs. People have been looking for direct air exhaust. dry vacuum pump

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