Vibration isolation frame work decoupled silicon micro-gyroscope and preparation thereof

Abstract

A silicon micro-gyroscope with vibration isolation framework decoupling comprises a first substrate and a second substrate above the first substrate; two detection electrodes are arranged on the first substrate; the second substrate comprises two drive mass blocks, two detection mass blocks, drive electrodes and a vibration isolation framework component; the two drive mass blocks with the same structure are symmetrically arranged and can be vibrated along the drive direction; the two detection mass blocks with the same structure are symmetrically arranged and can be vibrated along the detection direction; the detection mass blocks are arranged on the first substrate and above the two detection electrodes; the vibration isolation framework component is arranged at the middle part of the second substrate; and both ends of the vibration isolation framework component are respectively connected with the two drive mass blocks and the two detection mass blocks through elastic beams. The silicon micro-gyroscope with vibration isolation framework decoupling has simple and compact structure, low cost, simple machining technology, easy mass production and high product quality.

Description

technical field [0001] The invention mainly relates to the field of micro-electro-mechanical systems, in particular to a silicon micro-gyroscope decoupled by a vibration-isolation frame and a manufacturing method thereof. Background technique [0002] Compared with traditional gyroscopes, silicon micro-gyroscopes have the advantages of small size, light weight, and low price, and are widely used in aircraft stability control, weapon system navigation guidance, micro-satellite attitude control and other fields. Vibrating silicon micro-gyroscopes have become the main structural form of micro-gyroscopes because they have no rotating parts. With the development of MEMS technology, various silicon micro-mechanical gyroscopes are emerging in an endless stream in the world. Their common feature is that there are two vibration directions perpendicular to each other, that is, the vibration excitation direction and the sensitive vibration direction under the action of Coriolis force. ...

AI Technical Summary

Problems solved by technology

Although these decoupled micro-gyro structures separate the supporting beams of the driving mode and the detection mode, they do not completely separate the inertial masses of the two modes. When there is an input angular velocity, the inertial mass vibrates in both the driving mode and the The detection modal vibration caused by Coriolis force is prone to vibration coupling and affects the performance of the micro gyroscope

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