Two-dimension flexible hinge work bench of fiber optics displacement feedback closed-loop control

Abstract

A fiber displacement feedback closed-loop control two-dimensional flexible hinge worktable relates to a flexible hinge worktable and is provided with a two-dimensional flexible hinge platform, a horizontal piezoelectric ceramic drive, a vertical piezoelectric ceramic drive, a horizontal fiber displacement sensor and a vertical fiber displacement sensor; the two-dimensional flexible hinge platform is provided with a horizontal mounting hole, a vertical mounting hole, a horizontal fiber mounting channel and a vertical fiber mounting channel; the horizontal piezoelectric ceramic drive and the vertical piezoelectric ceramic drive are respectively arranged in the horizontal mounting hole and the vertical mounting hole; the horizontal fiber displacement sensor is provided with horizontal fibers, while the vertical fiber displacement sensor is provided with vertical fibers; the horizontal fibers and the vertical fibers are respectively arranged in the horizontal fiber mounting channel and the vertical fiber mounting channel; the horizontal fiber mounting channel and the vertical fiber mounting channel are respectively provided with curved-teeth structures; and the output ends of the horizontal fibers and the vertical fibers are externally connected with a detecting closed-loop control device.

Description

technical field [0001] The invention relates to a flexible hinge workbench, in particular to a two-dimensional flexible hinge workbench with optical fiber displacement feedback closed-loop control. Background technique [0002] In the engineering practice of ultra-precision machining and measurement and positioning, most of the flexible hinge worktables driven by piezoelectric ceramics are used to realize nano-drive and its positioning technology. Because piezoelectric ceramics have defects such as hysteresis, creep, and nonlinearity, their accuracy and positioning stability are limited. In order to improve the accuracy, precision displacement sensors are used in the industry to perform closed-loop feedback control on the workbench. At present, the most widely used precision displacement sensors are capacitive displacement sensors integrated with the workbench. If the change has a greater impact, it is difficult to guarantee its own accuracy. Therefore, the accuracy and pos...

AI Technical Summary

Problems solved by technology

In order to improve the accuracy, precision displacement sensors are used in the industry to perform closed-loop feedback control on the workbench. At present, the most widely used precision displacement sensors are capacitive displacement sensors integrated with the workbench. Changes have a greater impact, and it is difficult to guarantee its own accuracy. Therefore, the accuracy and positioning stability of the flexible hinge workbench are still limited.

[0003] Because the precision of the optical fiber displacement sensor can reach sub-nanometer, and it has the advantages of strong anti-interference, high flexibility, and more flexible spatial arrangement; therefore, if the optical fiber displacement sensor is applied to the two-dimensional flexible The accuracy and stability of the hinged workbench have been significantly improved, but there is no report on the application of optical fiber displacement sensors on the two-dimensional flexible hinged workbench

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