Magnetic fluid heat insulation device and heat insulation system

A heat insulation device and magnetic fluid technology, applied in rigid shaft couplings, engine seals, engine components, etc., can solve problems such as wafer pollution, vacuum environment damage, and impact on the life of magnetic fluid devices, so as to prevent pollution, The effect of avoiding damage

Inactive Publication Date: 2009-02-04
SEMICON MFG INT (SHANGHAI) CORP
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  • Abstract
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Problems solved by technology

[0004] However, using figure 2 The installation method shown has the following disadvantages: 1) The temperature of the magnetic fluid sealing device is easy to rise when it is working. Since the magnetic fluid device uses sealing oil to achieve sealing, excessive temperature will cause damage to the vacuum environment and directly affect the magnetic fluid. 2) the end face of the non-magnetic base 16 ...

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  • Magnetic fluid heat insulation device and heat insulation system
  • Magnetic fluid heat insulation device and heat insulation system
  • Magnetic fluid heat insulation device and heat insulation system

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Embodiment Construction

[0021] The magnetic fluid heat insulation device and heat insulation system of the present invention will be described in further detail below.

[0022] See image 3 , The magnetic fluid heat insulation device of the present invention includes a first flange 21, a second flange 22, and a heat insulation layer 23. The first flange 21 and the second flange 22 are respectively connected to the magnetic shaft 17 of the magnetic fluid device and the wafer boat support shaft 30 connected to the vacuum reaction chamber through a fixing element 24. The fixing element 24 can be implemented as a bolt and a method. The flanges 21, 22 and the shafts 17, 30 are respectively provided with screw holes matched with bolts to achieve fixation. The heat insulation layer 23 is provided between the first and second flanges 21 and 22 to block the heat transfer between the magnetic fluid device and the support shaft of the wafer boat, so as to prevent the heat generated by the vacuum reaction chamber he...

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Abstract

The invention discloses a magnetic fluid heat isolating device and a heat isolating system. The heat isolating device is used for connecting the magnetic guide shaft of a magnetic fluid device as well as a boat supporting shaft. The invention includes: a first flange connected with the magnetic guide shaft by a fixing piece, a second flange connected with the boat supporting shaft by a fixing piece, a heat isolating layer arranged between the first flange and the second flange as well as locking elements for connecting the first flange, a heat isolating layer and the second flange in turn. The heat isolating device of the invention can be adopted to effectively prevent the heat generated by the heater of a vacuum reaction chamber from being transmitted into the magnetic fluid device, thereby avoiding the damage to the magnetic fluid device caused by the overhigh working temperature. Besides, the dust particles generated near the space of the magnetic fluid device is pumped out by additionally arranging a vacuum pipeline, thus avoiding the wafers in the vacuum reaction chamber from being polluted.

Description

Technical field [0001] The invention relates to magnetic fluid sealing technology, in particular to a magnetic fluid heat insulation device and a corresponding system. Background technique [0002] The magnetic fluid device is often used for vacuum sealing, and its function is to transfer the rotating motion to the sealed container. At present, magnetic fluid devices have been used in many rotating sealing equipment, such as single crystal silicon furnaces, vacuum heat treatment furnaces, ion sputtering, physical chemical vapor deposition, ion plating, liquid crystal in-progress, electronic indicator and other equipment sealing, and Computer hard disks, robots, military products and other equipment with high environmental requirements are sealed in the environment, which has achieved good results. [0003] See figure 1 The magnetic fluid device is mainly composed of a bearing 11, a magnetic pole 12, a sealing groove 13 (with magnetic sealing oil distributed in it), a magnetic st...

Claims

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Application Information

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IPC IPC(8): F16J15/43F16D1/076
Inventor 王刚高文良亢健吴雨强
Owner SEMICON MFG INT (SHANGHAI) CORP
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