Thermal isolation micro-bridge structure and processing method thereof

Abstract

Disclosed are a heat insulation micro-bridge structure and the process method thereof, which belong to the technical field of a micro-electro-mechanical system. The heat insulation micro-bridge structure comprises a micro-bridge body 10, a substrate 13 and cantilever beams 11, 12, wherein the micro-bridge is suspended above the substrate 13 via the cantilever beams and forms a gap 14. As a folded structure is manufactured on the cantilever beams, the active heat insulated length of the cantilever beams is increased in the condition without influence on fill factors of the micro-bridge, thereby increasing the heat insulation effect of the micro-bridge structure. The micro-processing method of the micro-bridge includes depositing sacrificial layer materials on the surface of the substrate, producing a groove structure in the sacrificial layer, depositing and growing the sacrificial layer and forming the folded structure on the place around the groove structure on the sacrificial layer, further removing the sacrificial layer materials, thereby the micro-bridge structure which comprises the cantilever beams with the folded structure can be obtained. The micro-bridge structure can be widely used for the micro electro-mechanical system and devices such as non-refrigerated infrared detectors, gas detectors, micro-heating platforms, infrared origin devices and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and in particular relates to a heat-insulating enhanced micro-bridge structure used in a heat detector, a processing method thereof, and a sensor applying the heat-insulated micro-bridge structure. technical background [0002] In the field of micro-electromechanical systems, especially in the field of thermal sensors, the sensitive parts need to form maximum thermal insulation from the outside world. Usually the thermal insulation requirements of sensing devices are met by a design called "micro-bridge structure". That is, through the micromachining method, a thin and long cantilever beam support structure is manufactured to form a bridge-like structure suspended above the substrate. This structure is generally called a micro-bridge structure in the field of micro-electromechanical systems, especially in the field of thermal radiation detectors. Thermally insulated micr...

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Problems solved by technology

[0007] In order to overcome the disadvantages of the prior art micro-bridge structure that the fill factor decreases, the effective insulation length increases and the process is complicated, the purpose of the present invention is to provide a micro-bridge structure with simple process, which not only enhances the thermal insulation performance but also does not affect the fill factor.

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