Fabrication of high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling systems
A heat exchanger, miniature technology, used in heat exchange equipment, lighting and heating equipment, metal processing equipment, etc., to solve problems such as undescribed manufacturing
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[0057] The present invention describes a method of forming a conductive layer and joining multiple layers together to form a three-dimensional microstructured region. According to the present invention, microstructured regions comprise microgrids, microchannels, or some other microstructures. FIG. 1A shows a first embodiment of a micro-grid region, and FIG. 2A shows a second embodiment of a micro-grid region. Figure 1C shows multiple layers formed and joined together to form microchannels in accordance with an embodiment of the present invention.
[0058] Figure 1A shows two window layers 100, 150 formed from two thermally conductive layers in accordance with the present invention. Preferably, the two thermally conductive layers are formed using a wet etch process in which a photographic tool is used to determine the location and pattern of the microscopic openings 120, 170 of the window layers 100, 150. The two window layers include a plurality of thick solid rods 110, 160 ...
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