Image gray scale based automatic focusing method and its system
A technology of automatic focus and image grayscale, applied in the field of automatic focus based on image grayscale and its system, can solve the problems of inconvenientness and low measurement accuracy of automatic focus technology, and achieve improved detection quality and efficiency, automatic Easy and quick effect of focusing
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[0042] Example: This automatic focusing method based on image grayscale:
[0043] As shown in Figure 1, use a glass plate 5 with a length of 30 mm, an interval of 1 mm on the lithography, and a width of 1 mm with accurate black stripes as a correction reference for focusing, and place it directly below the imaging system, and the black stripes on the glass plate The target surface of the line scan CCD must be strictly perpendicular to ensure the authenticity of the imaging data.
[0044] The image is captured by the lens, and the CCD imager, that is, the charge coupled device (charge coupled device), captures the image information of the glass plate stripes passing through the lens, and the image acquisition card inputs the image signal into the microprocessor, and the image information is converted into digital electronics. Signal, transforming the image information into a grayscale change curve. Figure 2 is a schematic diagram of the grayscale change curve of the black strip...
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