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Particle counter with improved image sensor array

A particle counter and particle technology, used in particle size analysis, scientific instruments, particle and sedimentation analysis, etc., can solve problems such as being unable to follow the pace, and achieve the effect of increasing the signal-to-noise ratio and fast counting.

Inactive Publication Date: 2008-05-28
PARTICLE MEASURING SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, this conventional liquid OPC design cannot keep pace with the international semiconductor technology roadmap given in Table 1

Method used

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  • Particle counter with improved image sensor array
  • Particle counter with improved image sensor array
  • Particle counter with improved image sensor array

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Embodiment Construction

[0035] In the present disclosure, the term "light" is not limited to visible light radiation but is used in a broad sense, meaning any electromagnetic radiation, including infrared, ultraviolet, extreme ultraviolet, and x-ray radiation. The term "stray light" includes any unwanted light, that is, light that is not scattered from particles but can enter the collection optics. Multi-reflected light is an important source of stray light in particle counters in the prior art. In other words, light that is once reflected, scattered from a scattering source, or diffracted by a lens or aperture can usually be eliminated by other apertures or absorbing black walls even in conventional particle counters, because the source of unwanted light is known. . However, multiple reflections make it difficult to determine the direction of the light, and therefore often cannot be eliminated by the aperture or otherwise eliminated. As will be discussed below, the present invention provides a unique sy...

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Abstract

A particle counter for optically detecting an unconstrained particle of less than one micron in size suspended in a flowing liquid includes a sample chamber having a fluid inlet and a fluid outlet; a laser module producing a laser beam; a beam shaping optical system providing a multiple laser beam pattern in the sample chamber, and a CMOS optical detector located to detect light scattered by the particles in the sample chamber, the detector producing an electric signal characteristic of a parameter of the particle. The particle counter has a particle sensing area within the sample chamber in which the intensity of light is at least 10 Watts / mm<2>, the sensing area having an area of 0.5 square mm or more. The detector has thirty or more detector array elements. The laser optical system reflects and refocuses the laser beam to effect multiple passes of the same laser beam through the sensing area.

Description

Technical field [0001] The present invention generally relates to a system that uses the principle of light scattering to detect and count undesirable individual particles smaller than one micron in size in a fluid. These systems are generally referred to as optical particle counters (OPC) in the art. More specifically, the present invention relates to such a particle counter using a two-dimensional multi-unit detector array. Background technique [0002] Optical particle counters (OPC) are used to detect and measure the size of individual particles suspended in fluids. Generally speaking, particle counters are designed to detect particles smaller than one micron in size. Count each detected particle and provide an indication of the number of particles counted in the channel, where each channel corresponds to a specific size range. In order for the particle counter to work effectively, the density of particles in the fluid must be small enough to consider the particles as contami...

Claims

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Application Information

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IPC IPC(8): G01N15/02
Inventor 托德·A·切尔尼德怀特·A·细勒尔
Owner PARTICLE MEASURING SYST
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