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Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device

A technology of arrayed waveguide gratings and waveguide gratings, applied in the coupling of optical waveguides, etc., can solve problems such as difficult and accurate guarantee of height, insertion loss spectral characteristics, complex process, etc., to improve wavelength adjustment accuracy, ensure constant focal length, and spectral perfect effect

Active Publication Date: 2008-04-16
GUANGXUN SCI & TECH WUHAN
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

2) The adjustment of ITU-T wavelength is realized by temperature adjustment or plastic deformation, so the wavelength adjustment accuracy and repeatability are not very good; 3) The glue used for bonding is directly applied between the two contact surfaces, so some There is a height difference between part a and part b. In order to make up for this height difference, soft glue is coated between part a and the substrate. It is difficult to accurately ensure the height between part a and part b. At the same time, the waveguide size is only 5 or 6 microns , even a height difference on the order of microns will cause great deterioration of the insertion loss and spectral characteristics; 4) As shown in Figure 2, the existing technology has both ends of the wavelength compensation rod located on the upper surface of the AWG chip, but the compensation The two ends of the rod are bonded by solder and solder, and the soldering position has to go through processes such as photolithography and corrosion, and the solder and solder have to be melted at a high temperature of several hundred degrees, so the process is more complicated

Method used

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  • Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device
  • Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device
  • Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device

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Embodiment Construction

[0051] The method and fine-tuning device for fabricating athermal arrayed waveguide gratings based on the movement of slab waveguides of the present invention will be described in detail below with reference to the embodiments.

[0052] The present invention is to divide the chip into two parts a and b along the cutting line C on the input slab waveguide or the cutting line C on the output slab waveguide on the common silicon-based silicon dioxide AWG chip made by the planar optical waveguide technology. a includes the input waveguide 1 and a part of the input slab waveguide 2 , and part b includes the remaining part of the input slab waveguide 2 , the arrayed waveguide 3 , the output slab waveguide 4 and the output waveguide 5 . The substrate 8 is placed under the two parts a and b of the AWG chip to play a role of fixing and supporting. The temperature compensation rod 6 is placed across the cutting line of the AWG chip, and the glass baffle at one end of the temperature comp...

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PUM

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Abstract

The invention discloses a manufacturing method and a fine-adjustment device for apyrexia arrayed waveguide grating based on planar waveguide moving. The method is that: a AWG chip is reliably coupled with an input fiber array and an output fiber array; the AWG chip is cut into a movable part and a fixed part along a cutting line; and then the fixed part is stuck on a base board; the movable part is arranged on the base board; the cut faces of the two parts are tightly coupled; one side edge of a temperature compensating lever is tightly stuck to the movable part along the connection line of the two parts of the AWG chip; the fine-adjustment device is used to adjust the position of the temperature compensating lever so that the length of the output wave of the apyrexia arrayed waveguide grating satisfies the stipulation of ITU-T; and after the spectrum of the apyrexia arrayed waveguide grating has the same spectrum with the AWG, the other side edge of the temperature compensating lever is fixedly stuck to the fixed part. The fine-adjustment device of the invention is of a structure that the base board is fixedly stuck the AWG chip and the fine-adjustment device can adjust the position of the temperature compensating lever on the base. The invention is of easy operation, and greatly simplifies the technique of manufacturing apyrexia arrayed waveguide grating.

Description

technical field [0001] The invention relates to a method for manufacturing athermal arrayed waveguide gratings. In particular, it relates to a method of using the thermal expansion and contraction of the temperature compensation rod to drive the relative movement of the a and b parts of the AWG chip, thereby compensating for the wavelength drift caused by the temperature, to manufacture the heat-free arrayed waveguide grating based on the movement of the slab waveguide. Thermal arrayed waveguide grating method and fine-tuning device. Background technique [0002] Stimulated by the huge demand for bandwidth caused by the jet growth of data traffic represented by IP and the continuous emergence of new services, in the process of fully tapping the potential of optical communication technology and sparing no effort to utilize the huge bandwidth endowed by optical fibers, wavelength division Multiplexing (WDM) technology has gradually emerged with its unique advantages such as s...

Claims

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Application Information

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IPC IPC(8): G02B6/34
Inventor 周天红马卫东刘文赵秀丽祝业盛吴凡陈琳
Owner GUANGXUN SCI & TECH WUHAN
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