Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device
A technology of arrayed waveguide gratings and waveguide gratings, applied in the coupling of optical waveguides, etc., can solve problems such as difficult and accurate guarantee of height, insertion loss spectral characteristics, complex process, etc., to improve wavelength adjustment accuracy, ensure constant focal length, and spectral perfect effect
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[0051] The method and fine-tuning device for fabricating athermal arrayed waveguide gratings based on the movement of slab waveguides of the present invention will be described in detail below with reference to the embodiments.
[0052] The present invention is to divide the chip into two parts a and b along the cutting line C on the input slab waveguide or the cutting line C on the output slab waveguide on the common silicon-based silicon dioxide AWG chip made by the planar optical waveguide technology. a includes the input waveguide 1 and a part of the input slab waveguide 2 , and part b includes the remaining part of the input slab waveguide 2 , the arrayed waveguide 3 , the output slab waveguide 4 and the output waveguide 5 . The substrate 8 is placed under the two parts a and b of the AWG chip to play a role of fixing and supporting. The temperature compensation rod 6 is placed across the cutting line of the AWG chip, and the glass baffle at one end of the temperature comp...
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