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IV type concave holographic grating production process

A holographic grating and process flow technology, applied in diffraction grating and other directions, can solve the problems of unsatisfactory light collection efficiency of the spectrometer system, and achieve the effects of novel production process flow, shortened production cycle and easy realization.

Inactive Publication Date: 2008-01-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0002] In the vacuum ultraviolet, especially in the soft X-ray band, all substances have strong absorption of light radiation, and the traditional planar grating spectrometer introduces collimator and condenser, so there are additional losses caused by collimator and condenser, This is not ideal for improving the light collection efficiency of the entire spectrometer system

Method used

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  • IV type concave holographic grating production process

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Embodiment Construction

[0011] The present invention is implemented according to the steps of the preparation process flow chart shown in Fig. 1, specifically as follows:

[0012] 1. Clean the concave K9 glass substrate without bubbles, scratches and polished with calcium carbonate;

[0013] 2. Coat Shiply1805 positive photoresist with a thickness of 300-700nm on the concave K9 glass substrate. The thickness of the adhesive layer is realized according to the density of the groove and the control of the speed of the centrifuge;

[0014] 3. Put the photoresist-coated grating substrate into the oven for pre-baking, raise the oven temperature to 90°C, start timing, and take it out after 30 minutes;

[0015] 4. Expose the grating substrate in the interference field for 10-120 seconds, and control the exposure time according to the type of photoresist and the strength of the interference field;

[0016] 5. Put the exposed grating substrate into 5‰ NaOH solution, and develop it at room temperature for 10-6...

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Abstract

The invention is an IV-type concave holographic grating making process flow, belonging to the field of spectrum technique, relating a grating making process flow. And its technical solution comprises: substrate treatment, coating glue, front drying, holographic exposure, development, after drying, thermal melting, ion beam etching, cleaning, and plating. And it is novel, low-cost and easy to implement, especially replaces traditional reaction ion etching with photoresist thermal melting, largely reducing cost, and shortening making cycle, and it can reduce parts of system and eliminate astigmatism and coma of optical system.

Description

1. Technical field: [0001] The invention belongs to a manufacturing process flow of a type IV concave holographic grating related to the field of spectrum technology. 2. Background technology: [0002] In the vacuum ultraviolet, especially in the soft X-ray band, all substances have strong absorption of light radiation, and the traditional planar grating spectrometer introduces collimator and condenser, so there are additional losses caused by collimator and condenser, This is not ideal for improving the light collection efficiency of the entire spectrometer system. The concave grating is more superior, because the concave grating has self-focusing characteristics, it can form spectral lines without collimating optical system and focusing optical system during imaging. According to the different types and degrees of aberration correction, the concave holographic grating has developed from type I to type IV: [0003] Two beams of parallel light are used as light sources, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
Inventor 李文昊齐向东巴音贺希格
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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