Long wavelength laser transmitted perpendicular to surface of cavity by using integrated pumping light source
A technology of vertical cavity surface emission and fabrication method, which is applied in the field of long wavelength vertical cavity surface emitting lasers, and can solve the problems of device cost, increased packaging difficulty, difficult temperature characteristics, and difficulty in heat dissipation.
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[0079] Please refer to Fig. 1 and Fig. 2, the long-wavelength vertical cavity surface emitting laser structure of the integrated pump light source of the present invention includes: a lower electrode 1, a substrate 2, a lower Bragg reflector (DBR) 3, a lower confinement layer 4, Lower waveguide layer 5 , active region 6 , upper waveguide layer 7 , upper confinement layer 8 , ohmic contact layer 9 , upper electrode 10 and upper Bragg reflector (DBR) 11 .
[0080] The lower electrode 1 is Au-Ge-Ni;
[0081] Substrate 2 is an n-type InP substrate;
[0082] The lower Bragg reflector (DBR) 3 is 40 pairs of AlGaInAs / InP lattice-matched with InP, doped into n-type. It has a larger refractive index difference, a lower conduction band potential difference and a higher thermal conductivity;
[0083] The lower confinement layer 4 is n-type InP;
[0084] The lower waveguide layer 5 is InGaAsP with a bandgap wavelength of 1.2 μm, without doping;
[0085] The active region 6 is divided ...
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