Apparatus for operating and observing air under vacuum or low-pressure environment

Abstract

A device providing an observation environment of air by operating and controlling air under vacuum condition is prepared as using an isolation plate to isolate internal of shell to be an air chamber and to form a buffer chamber at external of air chamber, setting an internal hole separately on top and bottom isolation plates of air chamber, setting an external hole on each of top and bottom surfaces on shell, setting said holes on the same axis at flat portion, connecting air extraction hole on shell to buffer chamber and air injection hole on shell to said air chamber.

Description

technical field [0001] The present invention is related to the technique of operating gaseous substances in vacuum or low-pressure environment, and in particular refers to an observable device for operating gas in vacuum or low-pressure environment. Background technique [0002] Press, in terms of observation technology at the microscopic scale, it is currently known that the electron microscope is used to achieve the highest magnification effect. With the ultra-high magnification of the electron microscope, people can conduct related scientific research on the nanostructure of matter. [0003] The principle of the electron microscope is to use electron beams to detect objects. It must accelerate electrons through high voltage in a vacuum environment and use electromagnetic lens focusing to achieve the observation of nanostructures. As shown in Figure 11, the electron microscope 61 There is a sample chamber 62 (specimenchamber) available for sample insertion, the interior of...

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Problems solved by technology

[0006] Although the aforementioned technology can form extremely low-pressure water vapor in the water vapor layer, however, it has many shortcomings that need to be improved:

[0007] 1. The original design of the electron microscope must be changed, and the electron microscope must be disassembled. Not only is the process extremely complicated, it must be done by professionals, and its cost is also extremely expensive, and it is easy to damage the electron microscope, which makes this technology Cannot be mass-produced so far

[0008] 2. Increasing the height of the sample chamber of the electron microscope will change the focusing distance of the electron beam, resulting in a loss of phase difference and resolution

[0009] 3. Increasing the gas pressure in the gas chamber will cause the gas to leak from the outermost perforation 763 in Fig. 13 to the vacuum area, thus making it impossible to operate under normal pressure inside the gas chamber; although the pumping capacity of the buffer chamber 766 is greatly increased This gas leakage problem can be overcome, but the rapid gas extraction rate will cause the gas to generate serious eddy currents near the opening of the internal perforation 763, resulting in multiple scattering of electrons, resulting in the failure of electron beam imaging or electron diffraction experiments

Therefore, for the design of the thickness of the 1cm gas chamber, the operating pressure of the gas in the gas chamber is as high as 1 atmosphere, which will cause the problem of multiple scattering of electrons, which will cause the electron beam to fail to image smoothly or conduct electron diffraction experiments.

[0011] In addition, the design concept of Gai P.L. is still the same as that of Hui S W. During the modification process of the air chamber area, buffer zone and the whole system, the main body of the microscope must be disassembled to install these parts, so the possibility of mass production is not high.

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