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Differential feed dielectric barrier discharging low-temperature plasma device

A technology of dielectric barrier discharge and low-temperature plasma, which is applied in the field of plasma, can solve problems such as prominent insulation problems, increased manufacturing costs, and increased manufacturing difficulties, and achieve the effects of reducing insulation design requirements, improving operational reliability, and reducing volume

Inactive Publication Date: 2007-08-22
万京林 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In addition, with the increase of the voltage required for discharge, the insulation problems of high-voltage power supply, DBD and related high-voltage components are prominent, and the insulation distance of each component needs to be increased. Increase; the electric field intensity around the high-voltage leads and electrodes increases, causing the surrounding objects to be charged, which is detrimental to the safety of operators and the electromagnetic compatibility of equipment

Method used

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Embodiment 1

[0031] The differential feed dielectric barrier discharge low-temperature plasma device of this embodiment adopts a parallel flat DBD, and its structure is shown in Figure 1. In this embodiment, both the high-voltage electrode 2 and the high-voltage electrode 7 are metal plates, and the two output terminals of the differential output high-voltage power supply 1 The two output terminals of the differential output high-voltage power supply 1 are connected to the high-voltage electrode 2 and the high-voltage electrode 7 respectively, and the voltage to the ground is equal (or approximately equal), and the phase difference is 180 degrees (or approximately 180 degrees). The surfaces of the high-voltage electrode 2 and the high-voltage electrode 7 are respectively covered with a medium 3 and a medium 6 (the surface of a high-voltage electrode can also be covered with a medium). There is a gas gap 5 between the medium 3 and the medium 6. If the sample is to be processed, the sample 4 can...

Embodiment 2

[0033] The differentially fed dielectric barrier discharge low-temperature plasma device of this embodiment adopts parallel cylindrical electrodes DBD or parallel rectangular electrodes DBD, and its structure is shown in FIG. 2, and FIG. 3 is a schematic side view of FIG. 2. In this embodiment, the high-voltage electrode 8 and the high-voltage electrode 9 can be metal rods, metal particles, metal mesh or other conductive materials (the geometric dimensions of the two high-voltage electrodes can be the same or different), and the surfaces are respectively covered with a medium 10 and a medium 11 (also A high-voltage electrode can be covered with a medium). The two output terminals of the differential output high-voltage power supply 1 are connected to the high-voltage electrodes 8, 9 respectively. The two output terminals of the differential output high-voltage power supply 1 have the same (or approximately the same) voltage to ground and a phase difference of 180 Degree (or approx...

Embodiment 3

[0035]The differential feed dielectric barrier discharge low-temperature plasma device of this embodiment adopts a coaxial DBD, and its structure is shown in FIG. 4. In this embodiment, the high-voltage electrode 12 is made of metal, and its shape can be a tube, a mesh, or a particle. The high-voltage electrode 13 is a metal, and its shape can be a tube, a rod, a mesh, or a particle. The two output terminals of the differential output high-voltage power supply 1 are connected to the high-voltage electrode 12 and the high-voltage electrode 13, respectively. The two output terminals of the differential output high-voltage power supply 1 have the same (or approximately equal) voltage to the ground, and the phase difference is 180 degrees (or approximately 180 degrees). . The inner wall of the high voltage electrode 12 covers the medium 14, and the outside of the electrode 13 covers the medium 15. There is a gas gap 5 between the medium 14 and the medium 15. The differential output hi...

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Abstract

This invention relates to a low temperature plasma device for blocking discharge by a differential feeder medium including a difference output high voltage supply, two high voltage electrodes, in which, the output of the differential output high voltage supply is connected with the two high voltage electrodes, a layer of medium is covered on one of the electrodes or set at any place between the two electrodes, and the gas between them is the load and the voltages to the earth of the two output ends of the supply connected to the two electrodes are equal or almost equal, the phase difference is 180 deg. or approaching to 180deg, which can generate DBD of large discharge clearance for producing large volume of gas discharge low temperature plasma and reduce the supply output voltage necessary for gas discharge.

Description

Technical field [0001] The invention belongs to the technical field of gas discharge and plasma, and is specifically a low-temperature plasma device for differentially fed dielectric barrier discharge. Background technique [0002] Dielectric Barrier Discharge (DBD) is the main way to obtain large-area uniform low-temperature plasma for industrial use. DBD is generally a gas discharge between two electrodes, in which at least one electrode is covered with a dielectric layer, or a dielectric is set anywhere between the electrodes. Because DBD has the characteristics of high electron density and can operate under normal pressure, it has been widely used in industry. [0003] Current DBD devices generally use AC high-voltage power supply single-ended feeding mode excitation, that is, the high-voltage output end of the AC high-voltage power supply is connected with the high-voltage electrode of the DBD device, and the ground of the AC high-voltage power supply is connected with the g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/00H01J37/32H05H1/24
Inventor 万京林
Owner 万京林
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