Multi-parameter sensor for measuring differential pressure/pressure/temperature

Abstract

The invention discloses a multi-parameter sensor for simultaneous measurement of differential pressure, pressure and temperature. The piezoresistive static pressure sensor and the high-precision integrated temperature measurement chip that detects the digital output of the sensor itself and the temperature of the medium in contact with it. The three sensors are used to detect various parameters such as differential pressure, pressure, and temperature. It has the characteristics of small and exquisite appearance, light weight, and is easy to manufacture by conventional methods. Transmitters with different functions manufactured on this basis can be widely used in chemical industry, petroleum, metallurgy, power station and other departments to measure the pressure, liquid level, differential pressure, flow and other thermal engineering basics of liquid, gas and steam. parameters, can have a variety of compensation characteristics, and has a good development space.

Description

technical field [0001] The invention relates to a high-precision integrated temperature measurement chip that uses the principle of capacitance change to detect differential pressure (first pressure) signal, uses piezoresistive strain principle to detect static pressure (second pressure) signal, and uses digital output The utility model relates to a multi-parameter sensor for measuring differential pressure, pressure and temperature to detect the temperature of the sensor itself and the medium in contact with it, and belongs to the field of automatic instrument sensors. Background technique [0002] The measurement function of conventional sensors is relatively single, generally in the form of pure pressure, pure temperature, pure differential pressure, etc., and thermistors, semiconductor diodes, etc. can also be installed around the above sensors as temperature detection elements for temperature compensation of the sensor. The disadvantage is that the accuracy of temperatu...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a multi-parameter sensor for simultaneous measurement of differential pressure, pressure and temperature in order to solve the problem that the existing single-function sensor is difficult to meet the high requirements of the user to realize multiple parameter detection and improve various compensation effects on site Program

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