MgO evaporation material
A technology for evaporating materials and pellets, applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve problems such as wrong addressing and insufficient strength, improve brightness and reduce manufacturing costs , The effect of reducing the number of address ICs
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Embodiment 1
[0070] As a MgO vapor deposition material, polycrystalline MgO pellets with a purity of 99.95% of MgO, a relative density of 98%, and a concentration of Sc contained in MgO of 20 ppm were prepared. The diameter and thickness of the MgO vapor deposition material are 5 mm and 1.6 mm, respectively. In addition, an ITO electrode and a silver electrode were formed on the surface area to form electrodes, and in order to cover the electrodes, a glass substrate on which a dielectric glass layer was formed was prepared.
[0071] On the upper surface of the dielectric glass layer formed on the glass substrate, the above-mentioned MgO vapor deposition material was used to form a film thickness of (800nm), MgO film with (111) plane orientation. The film forming condition is that the final vacuum degree is 1.0×10 -4 Pa, oxygen partial pressure is 1.0×10 -2 Pa, substrate temperature is 200℃, film forming speed is / Sec (2nm / sec).
Embodiment 2
[0073] The MgO film was formed by the same method as in Example 1, except that a MgO vapor deposition material having a Sc concentration of 120 ppm contained in the MgO pellets was used.
Embodiment 3
[0075] The MgO film was formed by the same method as in Example 1, except that a MgO vapor deposition material with a Sc concentration of 300 ppm contained in the MgO pellets was used.
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