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Piezoelectric ceramic composition and piezoelectric element

A technology of piezoelectric ceramics and piezoelectric components, which is applied to electrical components, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. High numerical value and other problems, to achieve the effect of excellent piezoelectric characteristics and good electromechanical bonding coefficient

Inactive Publication Date: 2009-06-24
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] However, in the piezoelectric ceramic composition of the above-mentioned Patent Document 1, only a low relative permittivity εr of 350 or less can be obtained, and there is a problem that it is difficult to obtain an ideal impedance.
[0014] Furthermore, in Patent Document 1, there is also a piezoelectric constant d 33 Cases below 50 occur, in addition there is an electromechanical coupling coefficient K 33 Problems such as not being able to obtain high values ​​stably
[0015] In addition, Patent Document 2 discloses a ceramic material having a large relative permittivity εr, but even if it is large, it is still lower than 600, and a sufficient relative permittivity εr cannot be obtained.
Moreover, the ceramic material of Patent Document 2 is a ceramic material used in a microwave device, and has an electromechanical coupling coefficient K 33 and piezoelectric constant d 33 Piezoelectric characteristics such as can not obtain such a problem point

Method used

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  • Piezoelectric ceramic composition and piezoelectric element
  • Piezoelectric ceramic composition and piezoelectric element
  • Piezoelectric ceramic composition and piezoelectric element

Examples

Experimental program
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Effect test

Embodiment 1

[0093] First, weigh the following powders according to the composition of Table 1: Ag 2 O. Li 2 CO 3 , Nb 2 o 5 、 Ta 2 o 5 、 Bi 2 o 3 、Na 2 CO 3 、K 2 CO 3 、TiO 2 , ZrO 2 , SnO 2 , HfO 2 , using an electric furnace in an oxidative atmosphere at a temperature of 850° C. to 1100° C. for 10 hours of pre-calcination treatment to obtain pre-calcined objects.

[0094] Next, after performing wet pulverization treatment on this precalcined product, the polyvinyl alcohol resin as a binder is 5 parts by weight with respect to 100 parts by weight of the calcined product, and the precalcined product and the polyvinyl alcohol resin are mixed in this manner. , followed by drying, using a single-screw extruder to 9.8×10 8 The pressure of Pa is pressed to form a prism shape of 12 mm in length, 12 mm in width, and 2.5 mm in thickness, and then fired at 950°C to 1200°C for 3 to 10 hours in an oxidizing atmosphere to produce piezoelectric ceramics.

[0095] Next, Ag paste was app...

Embodiment 2

[0113] Weigh the following powders according to the composition of Table 2: Ag 2 O. Li 2 CO 3 , Nb 2 o 5 、 Ta 2 o 5 、BaO 3 , SrCO 3 , CaCO 3 , MgO, TiO 2 , ZrO 2 , SnO 2 , HfO 2 , using an electric furnace under an oxidizing atmosphere to perform pre-calcination treatment on each weighing object at a temperature of 800° C. to 1100° C. for 10 hours to obtain a pre-calcined object.

[0114] Thereafter, piezoelectric elements of sample numbers 41 to 80 were obtained by the same method and procedure as in Example 1.

[0115] Next, according to the same method and procedure as in Example 1, the relative permittivity εr and the electromechanical connection coefficient K under thickness vibration were carried out for the piezoelectric elements of sample numbers 41 to 80 33 , piezoelectric constant d under thickness vibration 33 , and the determination of the Curie temperature Tc.

[0116] Table 2 shows the components and measurement results of sample numbers 41 to 80. ...

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Abstract

The piezoelectric ceramic composition of the present invention contains the general formula {(1-n)(Ag1-xLix)m(Nb1-yTay)O3-n(M1, M2)M3O3} or {(1-n)(Ag1- The main component represented by xLix)m(Nb1-yTay)O3-nM4M5O3}, the x, y, z, m and n are respectively 0.075≤x<0.40, 0≤y<0.2, 0.98≤m≤1.0, and 0.01 ≤n≤0.1. In addition, M1 is a trivalent metal element such as Bi, M2 is a monovalent metal element such as K, Na, Li, Ag, M3 or M5 is a tetravalent metal element such as Ti, Zr, Sn, Hf, and M4 It is a divalent metal element such as Ba, Sr, Ca, or Mg. Thereby, a non-lead-based piezoelectric ceramic composition having a high relative permittivity, good piezoelectric properties such as an electromechanical coupling coefficient K33 and a piezoelectric constant d33, and excellent reliability, and a piezoelectric ceramic composition manufactured using the piezoelectric ceramic composition are realized. piezoelectric element.

Description

technical field [0001] The present invention relates to a piezoelectric ceramic composition and a piezoelectric element, in particular to a non-lead piezoelectric ceramic composition used in various piezoelectric elements, and a piezoelectric vibrator manufactured using the piezoelectric ceramic composition, Piezoelectric elements for piezoelectric actuators, piezoelectric filters, piezoelectric buzzers, piezoelectric sensors, etc. Background technique [0002] Pb(Ti, Zr)O is known as a raw material for piezoelectric elements such as piezoelectric vibrators 3 (lead zirconate titanate) and PbTiO 3 (lead titanate) piezoelectric ceramic composition. [0003] However, such a piezoelectric ceramic composition is environmentally unfavorable because it contains a Pb component, and the appearance of a non-lead-based piezoelectric material that does not contain a Pb component has been expected in recent years. [0004] So far, piezoelectric ceramic compositions containing the foll...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/495H01L41/187
Inventor 竹田敏和
Owner MURATA MFG CO LTD
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