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Multi-sample Hall effect automatic testing apparatus

An automatic test equipment and Hall effect technology, which is applied in the direction of single semiconductor device testing, measuring electricity, measuring devices, etc., can solve the problems of low work efficiency, achieve improved measurement efficiency, friendly man-machine interface, and large function expansion Effect

Inactive Publication Date: 2009-02-11
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
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  • Claims
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Problems solved by technology

The work efficiency is relatively low, and it can only meet the testing or experimental requirements of a small amount of semiconductor materials, and cannot meet the testing of electrical parameters of semiconductor materials that require batch testing.

Method used

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  • Multi-sample Hall effect automatic testing apparatus
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  • Multi-sample Hall effect automatic testing apparatus

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Embodiment Construction

[0027] The following is based on Figure 1 to Figure 10 Provide a better embodiment of the present invention, and in conjunction with the description to the embodiment, further provide the technical details of the present invention, can better illustrate the structural features and functional characteristics of the present invention, but are not used to limit the present invention Therefore, all embodiments that conform to the spirit of the scope of the present invention and similar changes should be included in the scope of the present invention.

[0028] see figure 1 As shown, the device of the present invention includes a master system 1 and a slave system 2 . The main system 1 includes: a 100V20A DC stabilized power supply 101, a current source 102, a voltmeter 103, a relay input and output module 108, and a high-power relay input and output module 109; the slave system includes an electromagnet 111, a liquid nitrogen Dewar 112, and a stainless steel casing 113, sample h...

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Abstract

The invention relates to a multi-sheet sample Hall-effect tester based on multi sample Hall-effect, used to test the electric transmission property of semi-conductor, wherein said device is formed by one host system, one subsystem and one PC; said host system generates and receives the test signal and automatically switches the tested sample; the subsystem provides test platform and test magnetic field, to measure the electric parameter and display the result on test panel. The invention can continuously test multi-sheet sample, and accurately control magnetic field, to improve the test efficiency and test accuracy. And it can realize I-V curvature test of semi-conductor test electrode, variable magnetic field Hall-effect test, and electric data storage.

Description

Technical field: [0001] The invention relates to a multi-sample testing device for electrical parameters of semiconductor materials, especially suitable for batch testing of electrical parameters of semiconductor materials at room temperature or low temperature, such as satellite infrared detectors. The number of test samples is 1 to 6 pieces. Background technique: [0002] Because most of the current Hall test systems can only realize the automatic measurement of the electrical parameters of a single sample. Therefore, the test of multiple samples can only be performed by loading a single sample into the sample holder at a time. After the test, it needs to be taken out and then another sample is loaded. The working efficiency is relatively low, and it can only meet the testing or experimental requirements of a small amount of semiconductor materials, and cannot meet the testing of electrical parameters of semiconductor materials that require batch testing. Multi-sample Ha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26G01R31/00G01R33/12
Inventor 杨晓阳陈新禹林杏潮陆荣邵秀华张莉萍龚海梅
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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